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Surface emitting laser diode with Al/sub x/Ga/sub 1-x/As /GaAs multilayered heterostructure

Journal Article · · J. Vac. Sci. Technol., B; (United States)
DOI:https://doi.org/10.1116/1.583099· OSTI ID:6104950
We realize the first distributed feedback surface emitting laser diode withAl/sub 0.3/Ga/sub 0.7/As/GaAs multilayered heterostructure both by opticalpumping and current injection. Sharp stimulated emission is observed at theselected wavelength determined by the optical cavity. Lateral p--n junction is formed by a selective Zn diffusion. The threshold current is 120 mA at 150 K with the active layer thickness of 6 ..mu..m and width of 3 ..mu..m. The temperature coefficient of the lasing wavelength is equal to a conventioal DFB laser diode. Anomalous mixing is found in the course of Zn diffusion and succeeding thermal treatment.
Research Organization:
Electrotechnical Laboratory, Sakura-mura, Niihari-gun, Ibaraki 305, Japan
OSTI ID:
6104950
Journal Information:
J. Vac. Sci. Technol., B; (United States), Journal Name: J. Vac. Sci. Technol., B; (United States) Vol. 3:2; ISSN JVTBD
Country of Publication:
United States
Language:
English