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Spectroscopic studies of hydrogenated amorphous silicon. Annual report, March 15, 1984-March 15, 1985

Technical Report ·
DOI:https://doi.org/10.2172/6103079· OSTI ID:6103079
Nuclear magnetic resonance (NMR), electron spin resonance (ESR), and photoluminescence (PL) spectroscopies have been used to study amorphous silicon films prepared by SERI subcontractors. NMR measurements show that the bonding of hydrogen in material propared by chemical vapor deposition (CVD) is similar to that in a-Si:H prepared using glow discharge. ESR and PL have been used to depth profile defects in CVD prepared films. These measurements indicate a concentration of defects in the top 5000 A. Light-induced effects in CVD-prepared films and dopants in microcrystalline Si:H have also been studied using ESR.
Research Organization:
Naval Research Lab., Washington, DC (USA)
DOE Contract Number:
AC02-83CH10093
OSTI ID:
6103079
Report Number(s):
SERI/STR-211-2896; ON: DE86004427
Country of Publication:
United States
Language:
English