Gaseous ion reactions in SiF/sub 4/ and SiF/sub 4/--D/sub 2/ mixtures
Journal Article
·
· J. Appl. Phys.; (United States)
The gas-phase reactions of D/sup +//sub 2/, D/sup +//sub 3/, SiF/sup +/, and SiF/sup +//sub 3/ with SiF/sub 4/ and of SiF/sup +/ and SiF/sup +//sub 3/ with D/sub 2/ have been studied in the center-of-mass energy range of 0.2--7 eV using a tandem mass spectrometer. Only one reaction of a silicon-containing ion with SiF/sub 4/ was observed, namely the highly endothermic transfer of F/sup -/ from SiF/sub 4/ to SiF/sup +/. Hence the SiF/sub 4/ molecule must be almost unique in showing a virtual absence of gas-phase ionic chemistry in pure SiF/sub 4/ subjected to ionization. Several ion-molecule reactions were observed in the SiF/sub 4/--D/sub 2/ system but of these only the dissociative F/sup -/ transfer from SiF/sub 4/ to D/sub 2//sup +/ is exothermic. The almost total absence of exothermic ion-molecule reactions means that the ionic distribution pertinent to the plasma chemistry of the SiF/sub 4/ and SiF/sub 4/--H/sub 2/ systems will be determined solely by the cross sections of the electron impact ionization processes.
- Research Organization:
- Davey Laboratory, Department of Chemistry, The Pennsylvania State University, University Park, Pennsylvania 16802
- DOE Contract Number:
- AC02-76ER03416
- OSTI ID:
- 6098116
- Journal Information:
- J. Appl. Phys.; (United States), Journal Name: J. Appl. Phys.; (United States) Vol. 54:6; ISSN JAPIA
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
400201* -- Chemical & Physicochemical Properties
CENTER-OF-MASS SYSTEM
CHARGED PARTICLES
CHEMICAL REACTIONS
CHEMISTRY
CROSS SECTIONS
DATA
DEUTERIUM
DEUTERIUM IONS
DISPERSIONS
DISSOCIATION
EXPERIMENTAL DATA
FLUIDS
FLUORIDES
FLUORINE COMPOUNDS
GASES
HALIDES
HALOGEN COMPOUNDS
HYDROGEN ISOTOPES
INFORMATION
IONIZATION
IONS
ISOTOPES
LIGHT NUCLEI
MASS SPECTROSCOPY
MATHEMATICAL MODELS
MIXTURES
NUCLEI
NUMERICAL DATA
ODD-ODD NUCLEI
SILICON COMPOUNDS
SILICON FLUORIDES
SPECTROSCOPY
STABLE ISOTOPES
400201* -- Chemical & Physicochemical Properties
CENTER-OF-MASS SYSTEM
CHARGED PARTICLES
CHEMICAL REACTIONS
CHEMISTRY
CROSS SECTIONS
DATA
DEUTERIUM
DEUTERIUM IONS
DISPERSIONS
DISSOCIATION
EXPERIMENTAL DATA
FLUIDS
FLUORIDES
FLUORINE COMPOUNDS
GASES
HALIDES
HALOGEN COMPOUNDS
HYDROGEN ISOTOPES
INFORMATION
IONIZATION
IONS
ISOTOPES
LIGHT NUCLEI
MASS SPECTROSCOPY
MATHEMATICAL MODELS
MIXTURES
NUCLEI
NUMERICAL DATA
ODD-ODD NUCLEI
SILICON COMPOUNDS
SILICON FLUORIDES
SPECTROSCOPY
STABLE ISOTOPES