Processing of thick-film dielectrics compatible with thin-film superconductors for analog signal processing devices
The authors have demonstrated the feasibility of integrating thick-film dielectrics with thin-film superconductors in the fabrication of signal processing devices. Thin films of Nb and NbN are deposited by rf sputtering and patterned photolithographically. Thick film dielectrics can be spun-on to a controlled thickness of 10 to 25 microns, which is an optimum range for high-density, low-loss microwave delay lines. After an organic-binder burnout step at 450/sup 0/C in air, the ceramic dielectrics are sintered onto the NbN thin films at 850/sup 0/C in vacuum. The transition temperature of the NbN changes from 15 K as sputtered to 9 K after sintering, but superconductivity is preserved by the presence of thin-film MgO and SiO/sub 2/ barrier layers. Lumped-element resonators, in which the inductor and the capacitor electrodes are made of NbN and the dielectric of thick film ceramic, have been successfully fabricated for measuring the dielectric properties of the ceramics at 4.2 K and 10 MHz. Preliminary results indicate a dielectric constant of 6-8 and tan delta of 10/sup -2/.
- Research Organization:
- Lincoln Lab., Massachusetts Institute of Technology, Lexington, MA (US); Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, Cambridge, MA (US)
- OSTI ID:
- 6091738
- Report Number(s):
- CONF-880812-
- Journal Information:
- IEEE Trans. Magn.; (United States), Journal Name: IEEE Trans. Magn.; (United States) Vol. 25:2; ISSN IEMGA
- Country of Publication:
- United States
- Language:
- English
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71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ANALOG SYSTEMS
CHEMISTRY
DESIGN
DIELECTRIC PROPERTIES
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELECTRONIC CIRCUITS
ETCHING
FABRICATION
FILMS
INTEGRATED CIRCUITS
MICROELECTRONIC CIRCUITS
NIOBIUM COMPOUNDS
NIOBIUM NITRIDES
NITRIDES
NITROGEN COMPOUNDS
OPTIMIZATION
PHOTOCHEMISTRY
PHYSICAL PROPERTIES
PNICTIDES
REFRACTORY METAL COMPOUNDS
RF SYSTEMS
SINTERING
SPUTTERING
SUPERCONDUCTING FILMS
SUPERCONDUCTIVITY
SURFACE FINISHING
THERMODYNAMIC PROPERTIES
TRANSITION ELEMENT COMPOUNDS
TRANSITION TEMPERATURE