NbN/MgO/NbN Josephson tunnel junctions fabricated on thin underlayers of MgO
Underlayers of MgO as thin as 8.0 nm have been used in the fabrication of NbN/MgO/NbN Josephson tunnel junctions. NbN/MgO/NbN trilayers with and without MgO underlayers were deposited on thermally oxidized Si substrates at 100/sup 0/C using RF magnetron sputtering in a semi-UHV load lock vacuum system. Sputtering parameters were first optimized to produce NbN with T/sub c/ = 14.7 K on SiO/sub c//Si substrates, and then, thin MgO underlayers were used to enhance the T/sub c/ of the trilayers to 15.7 K. X-ray diffraction of NbN films indicates that thin MgO underlayers of 8.0 nm are capable of almost completely removing the NbN (111) diffraction peak found in lower T/sub c/ films and enhancing the NbN (200) peak. MgO underlayers were found to be oriented in the (100) direction when sputtered in an atmosphere of Ar and N/sub 2/ and randomly oriented when sputtered in an Ar alone. The authors present details for the preparation and analysis of NbN and MgO films as well as the fabrication and electrical performance of tunnel junctions with and without MgO underlayers.
- Research Organization:
- Hughes Aircraft Co., Carlsbad, CA (US)
- OSTI ID:
- 6087525
- Report Number(s):
- CONF-880812-
- Journal Information:
- IEEE Trans. Magn.; (United States), Vol. 25:2; Conference: Applied superconductivity conference, San Francisco, CA, USA, 21 Aug 1988
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
GENERAL PHYSICS
36 MATERIALS SCIENCE
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
JOSEPHSON JUNCTIONS
FABRICATION
MAGNESIUM OXIDES
SUPERCONDUCTIVITY
NIOBIUM NITRIDES
SUPERCONDUCTING FILMS
DESIGN
MAGNETRONS
OPTIMIZATION
PERFORMANCE
SPUTTERING
TRANSITION TEMPERATURE
TUNNELING
VACUUM SYSTEMS
ALKALINE EARTH METAL COMPOUNDS
CHALCOGENIDES
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELECTRON TUBES
ELECTRONIC EQUIPMENT
EQUIPMENT
FILMS
JUNCTIONS
MAGNESIUM COMPOUNDS
MICROWAVE EQUIPMENT
MICROWAVE TUBES
NIOBIUM COMPOUNDS
NITRIDES
NITROGEN COMPOUNDS
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
PNICTIDES
REFRACTORY METAL COMPOUNDS
SUPERCONDUCTING JUNCTIONS
THERMODYNAMIC PROPERTIES
TRANSITION ELEMENT COMPOUNDS
420201* - Engineering- Cryogenic Equipment & Devices
360201 - Ceramics
Cermets
& Refractories- Preparation & Fabrication
360204 - Ceramics
Cermets
& Refractories- Physical Properties
656003 - Condensed Matter Physics- Interactions between Beams & Condensed Matter- (1987-)