Contribution of the ion-energy distribution to the current-density distribution of a focused-ion beam

Journal Article · Tue Sep 01 04:00:00 EDT 1987 · J. Vac. Sci. Technol., B; (United States)

DOI:https://doi.org/10.1116/1.583616· OSTI ID:6085470

Kawanami, Y; Ishitani, T; Umemura, K; Shukuri, S

A general expression for the current-density distribution of a focused-ion beam (FIB) in the chromatic-aberration region is set up in the form of a definite integral. With the experimentally obtained ion-energy distribution of a liquid-metal ion source, its contribution to the FIB current-density distribution is estimated. Calculated results explain the wide-exponential tail of a FIB.

• Research Organization: Central Research Laboratory, Hitachi Ltd., Kokubunji, Tokyo 185, Japan
• OSTI ID: 6085470
• Journal Information: J. Vac. Sci. Technol., B; (United States), Journal Name: J. Vac. Sci. Technol., B; (United States) Vol. 5:5; ISSN JVTBD
• Country of Publication: United States
• Language: English

Related Subjects

640301* -- Atomic
Molecular & Chemical Physics-- Beams & their Reactions
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
BEAM OPTICS
BEAMS
CURRENT DENSITY
DATA
ELEMENTS
EXPERIMENTAL DATA
FLUIDS
FOCUSING
INFORMATION
ION BEAMS
ION SOURCES
LIQUID METALS
LIQUIDS
METALS
NUMERICAL DATA
THEORETICAL DATA