Coarse guidelines in designing focused ion beam optics

Journal Article · Wed Mar 01 04:00:00 EST 1995 · Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena

DOI:https://doi.org/10.1116/1.587948· OSTI ID:165132

Ishitani, T ^[1]; Kawanami, Y ^[2]

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1. Instrument Division, Hitachi, Ltd., Hitachinaka, Ibaraki 312 (Japan)
2. Central Research Laboratory, Hitachi, Ltd., Kokubunji, Tokyo 185 (Japan)

Coarse guidelines for designing a two-lens focused ion beam (FIB) column have been proposed, based on the locus of the characteristic point in the FIB spot versus current (i.e., {ital d}--{ital Ip}) graph in logarithmic scale. Here, the characteristic point is the intersection of two lines corresponding to {ital d}=Gaussian beam spot and {ital d}=chromatic aberrations spot in the graph. These guidelines are especially useful for designing the FIB column, which is applied both for the milling using wide range diameter FIBs with high current density and for the scanning ion microscope imaging with high image resolution. {copyright} {ital 1995} {ital American} {ital Vacuum} {ital Society}

• OSTI ID: 165132
• Journal Information: Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena, Journal Name: Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena Journal Issue: 2 Vol. 13; ISSN JVTBD9; ISSN 0734-211X
• Country of Publication: United States
• Language: English

Related Subjects

66 PHYSICS
BEAM OPTICS
CHROMATIC ABERRATIONS
DESIGN
ELECTROSTATIC LENSES
FOCUSING
GEOMETRICAL ABERRATIONS
ION BEAMS
MICROSCOPES