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Effect of hydrogen on the diode properties of reactively sputtered amorphous silicon Schottky barrier structures

Journal Article · · Appl. Phys. Lett.; (United States)
DOI:https://doi.org/10.1063/1.92821· OSTI ID:6074046
The diode properties of reactively sputtered hydrogenated amorphous silicon Schottky barrier structures (a-SiH/sub x/ /Pt) have been investigated. We find a systematic relation between the changes in the open circuit voltage, the barrier height, and the diode quality factor. These results are accounted for by assuming that hydrogen incorporation into the amorphous silicon network removes states from the top of the valence band and sharpens the valence-band tail. Interfacial oxide layers play a significant role in the low hydrogen content, and low band-gap regime.
Research Organization:
Corporate Research Laboratory, Exxon Research and Engineering Company, Linden, New Jersey 07036
OSTI ID:
6074046
Journal Information:
Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 39:8; ISSN APPLA
Country of Publication:
United States
Language:
English