Amorphous titanium carbide films produced by low-temperature organometallic CVD
Journal Article
·
· Advanced Ceramic Materials; (USA)
- Univ. of Illinois, Urbana (USA)
Amorphous titanium carbide films were produced by low-temperature (<300{degree}C) and low-pressure (< 10{sup {minus}3} Pa) metallorganic chemical vapor deposition from tetraneopentyl-titanium. X-ray and electron diffraction studies showed that the deposits were amorphous. The coatings were analyzed by Auger electron spectroscopy, electron energy loss spectroscopy, and electron spectroscopy for chemical analysis. The results of these studies suggest a deposition mechanism and lead to an understanding of the film morphology and microchemistry and the exceptional stability of the amorphous phase. It is believed that organic clusters and hydrogen, resulting from the decomposition of the Ti(neopenyl){sub 4} molecule, are present in the TiC films, and that they probably played a major role in stabilizing the amorphous phase to higher temperatures (> 1,000{degree}C) than typical glassy metals, in agreement with other studies of similar systems.
- OSTI ID:
- 6073880
- Journal Information:
- Advanced Ceramic Materials; (USA), Journal Name: Advanced Ceramic Materials; (USA) Vol. 2:3A; ISSN 0883-5551; ISSN ACEME
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360202 -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
AUGER ELECTRON SPECTROSCOPY
CARBIDES
CARBON COMPOUNDS
CHEMICAL COATING
CHEMICAL VAPOR DEPOSITION
COHERENT SCATTERING
CRYSTAL STRUCTURE
DATA
DEPOSITION
DIFFRACTION
ELECTRON DIFFRACTION
ELECTRON SPECTROSCOPY
EXPERIMENTAL DATA
HIGH TEMPERATURE
HIGH VACUUM
INFORMATION
MICROSTRUCTURE
NUMERICAL DATA
SCATTERING
SPECTROSCOPY
SURFACE COATING
TITANIUM CARBIDES
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
X-RAY DIFFRACTION
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360202 -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
AUGER ELECTRON SPECTROSCOPY
CARBIDES
CARBON COMPOUNDS
CHEMICAL COATING
CHEMICAL VAPOR DEPOSITION
COHERENT SCATTERING
CRYSTAL STRUCTURE
DATA
DEPOSITION
DIFFRACTION
ELECTRON DIFFRACTION
ELECTRON SPECTROSCOPY
EXPERIMENTAL DATA
HIGH TEMPERATURE
HIGH VACUUM
INFORMATION
MICROSTRUCTURE
NUMERICAL DATA
SCATTERING
SPECTROSCOPY
SURFACE COATING
TITANIUM CARBIDES
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
X-RAY DIFFRACTION