Structural studies of hydrogen-bombarded silicon using ellipsometry and transmission electron microscopy
Journal Article
·
· J. Vac. Sci. Technol., A; (United States)
Hydrogen-bombardment-induced structural changes in single-crystal silicon were studied using ellipsometry and transmission electron microscopy techniques. Hydrogen ion energies ranged from 400 to 1900 eV and the total dose was about 5 x 10/sup 19/ ions/cm/sup 2/. Various degrees of damage and phase mixtures in the layers were identified. It was concluded that ellipsometry can be used effectively as a nondestructive characterizational tool for analyzing bombardment-induced microstructural changes in this material.
- Research Organization:
- Standard Oil Company Research Center, Cleveland, Ohio 44128
- DOE Contract Number:
- AC02-83CH10093
- OSTI ID:
- 6066295
- Journal Information:
- J. Vac. Sci. Technol., A; (United States), Journal Name: J. Vac. Sci. Technol., A; (United States) Vol. 4:2; ISSN JVTAD
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
36 MATERIALS SCIENCE
360605* -- Materials-- Radiation Effects
CATIONS
CHARGED PARTICLES
CRYSTAL STRUCTURE
CRYSTALS
DAMAGE
ELECTRON MICROSCOPY
ELEMENTS
ELLIPSOMETRY
ENERGY RANGE
EV RANGE
EV RANGE 100-1000
HYDROGEN IONS
HYDROGEN IONS 1 PLUS
IONS
KEV RANGE
KEV RANGE 01-10
MATERIALS TESTING
MEASURING METHODS
MICROSCOPY
MICROSTRUCTURE
MONOCRYSTALS
NONDESTRUCTIVE TESTING
PHYSICAL RADIATION EFFECTS
RADIATION EFFECTS
SEMIMETALS
SILICON
TESTING
TRANSMISSION ELECTRON MICROSCOPY
360605* -- Materials-- Radiation Effects
CATIONS
CHARGED PARTICLES
CRYSTAL STRUCTURE
CRYSTALS
DAMAGE
ELECTRON MICROSCOPY
ELEMENTS
ELLIPSOMETRY
ENERGY RANGE
EV RANGE
EV RANGE 100-1000
HYDROGEN IONS
HYDROGEN IONS 1 PLUS
IONS
KEV RANGE
KEV RANGE 01-10
MATERIALS TESTING
MEASURING METHODS
MICROSCOPY
MICROSTRUCTURE
MONOCRYSTALS
NONDESTRUCTIVE TESTING
PHYSICAL RADIATION EFFECTS
RADIATION EFFECTS
SEMIMETALS
SILICON
TESTING
TRANSMISSION ELECTRON MICROSCOPY