Buildup of ion implantation damage in Hg/sub 1/minus//ital x// Cd/sub /ital x//Te for various /ital x/ values

Journal Article · Sat Jul 01 04:00:00 EDT 1989 · J. Vac. Sci. Technol., A; (United States)

DOI:https://doi.org/10.1116/1.575799· OSTI ID:6056330

Uzan-Saguy, C; Comedi, D; Richter, V; Kalish, R; Triboulet, R

The buildup of damage induced by In ion implantation into Hg/sub 1/minus//ital x// Cd/sub /ital x// Te for various composition (/ital x/=0, /ital x/=0.24, /ital x/=0.4, /ital x/=0.7, and /ital x/=1) was measured by means of channeling Rutherford backscattering spectroscopy (RBS). Damage profiles were extracted from the spectra using a model based on Quere's dechanneling treatment. Despite the large difference in bond nature and the related physical properties between the different compositions, the general trends in damage formation were found similar for all /ital x/ values studied, though displaced by about two orders of magnitude in dose, HgTe damaging much easier than CdTe. For all compositions, different types of damage seem to be created at different stages during the implantation. The results can be understood if agglomeration of point defects to extended defects followed by a redistribution of the defects to deeper lying clusters with increasing dose is assumed.

• Research Organization: Solid State Institute, Technion-Israel Institute of Technology, Haifa 32 000, Israel(IL); Laboratoire de Physique des Solides, Centre National de la Recherche Scientifique, 1 Place A. Briand, 92195 Meudon Principal Cedex, France
• OSTI ID: 6056330
• Journal Information: J. Vac. Sci. Technol., A; (United States), Journal Name: J. Vac. Sci. Technol., A; (United States) Vol. 7:4; ISSN JVTAD
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360102* -- Metals & Alloys-- Structure & Phase Studies
ALLOY SYSTEMS
BINARY ALLOY SYSTEMS
CADMIUM COMPOUNDS
CADMIUM TELLURIDES
CHALCOGENIDES
CHARGED PARTICLES
COLLISIONS
CRYSTAL DEFECTS
CRYSTAL STRUCTURE
DAMAGE
ELASTIC SCATTERING
INDIUM IONS
ION COLLISIONS
ION IMPLANTATION
IONS
MERCURY COMPOUNDS
MERCURY TELLURIDES
RUTHERFORD SCATTERING
SCATTERING
TELLURIDES
TELLURIUM COMPOUNDS