Effect of argon and hydrogen on deposition of silicon from tetrachlorosilane in cold plasmas
Conference
·
OSTI ID:6041690
The roles of Ar and H/sub 2/ on the decomposition of SiCl/sub 4/ in cold plasma were investigated by Langmuir probes and mass spectrometry. Decomposition of the reactant by Ar only has been found to be very slow. In presence of H/sub 2/ in the plasma SiCl/sub 4/ is decomposed by fast radical-molecule reactions which are further enhanced by Ar due to additional ion-molecule reactions in which more H radicals are produced. A model for the plasma-surface interactions during deposition of mu-Si in the Ar + H/sub 2/ + SiCl/sub 4/ system is presented.
- Research Organization:
- National Aeronautics and Space Administration, Cleveland, OH (USA). Lewis Research Center
- OSTI ID:
- 6041690
- Report Number(s):
- N-86-17472; NASA-TM-87219; E-2820; CONF-851217-64
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
400201 -- Chemical & Physicochemical Properties
ARGON
CHEMICAL REACTION KINETICS
CHEMICAL REACTIONS
CHLORIDES
CHLORINE COMPOUNDS
DATA
DECOMPOSITION
DEPOSITION
ELEMENTS
EXPERIMENTAL DATA
FLUIDS
GASES
HALIDES
HALOGEN COMPOUNDS
HYDRIDES
HYDROGEN
HYDROGEN COMPOUNDS
INFORMATION
KINETICS
NONMETALS
NUMERICAL DATA
ORGANIC COMPOUNDS
ORGANIC SILICON COMPOUNDS
RARE GASES
REACTION KINETICS
SEMIMETALS
SILANES
SILICON
SILICON CHLORIDES
SILICON COMPOUNDS
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
400201 -- Chemical & Physicochemical Properties
ARGON
CHEMICAL REACTION KINETICS
CHEMICAL REACTIONS
CHLORIDES
CHLORINE COMPOUNDS
DATA
DECOMPOSITION
DEPOSITION
ELEMENTS
EXPERIMENTAL DATA
FLUIDS
GASES
HALIDES
HALOGEN COMPOUNDS
HYDRIDES
HYDROGEN
HYDROGEN COMPOUNDS
INFORMATION
KINETICS
NONMETALS
NUMERICAL DATA
ORGANIC COMPOUNDS
ORGANIC SILICON COMPOUNDS
RARE GASES
REACTION KINETICS
SEMIMETALS
SILANES
SILICON
SILICON CHLORIDES
SILICON COMPOUNDS