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Decomposition of SiCl/sub 4/ and deposition of Si in inductively coupled plasmas of H/sub 2/ + SiCl/sub 4/

Journal Article · · Plasma Chem. Plasma Process.; (United States)
DOI:https://doi.org/10.1007/BF01019176· OSTI ID:6448130
; ;
The mechanism of homogeneous reactions in plasmas of H/sub 2/ + 5% SiCl/sub 4/ was studied by mass spectrometry and was compared to the mechanism observed in plasmas of Ar + H/sub 2/ + SiCl/sub 4/. Contrary to the behavior with Ar, the results indicate that without argon the SiCl/sub 4/ molecule undergoes only fragmentation and the deposition proceeds through SiCl/sub 2/. No polymerization was observed. The deposition rates of ..mu..c-Si were lower and the amounts of chlorine incorporated in the films were higher in the plasma of SiCl/sub 4/ + H/sub 2/ than in the argon-containing plasma.
Research Organization:
Ben-Gurion Univ. of the Negev, Beer-Sheva, Israel
OSTI ID:
6448130
Journal Information:
Plasma Chem. Plasma Process.; (United States), Journal Name: Plasma Chem. Plasma Process.; (United States) Vol. 7:2; ISSN PCPPD
Country of Publication:
United States
Language:
English

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Related Subjects

14 SOLAR ENERGY
140501* -- Solar Energy Conversion-- Photovoltaic Conversion
36 MATERIALS SCIENCE
360101 -- Metals & Alloys-- Preparation & Fabrication
37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
400201 -- Chemical & Physicochemical Properties
ARGON
CHEMICAL REACTION KINETICS
CHEMICAL REACTIONS
CHLORIDES
CHLORINE COMPOUNDS
COATINGS
COLLISIONS
COMPARATIVE EVALUATIONS
DECOMPOSITION
DEPOSITION
DIRECT ENERGY CONVERTERS
DISSOCIATION
ELECTRON COLLISIONS
ELECTRON MICROSCOPY
ELECTRON-MOLECULE COLLISIONS
ELEMENTS
EQUIPMENT
FILMS
FLUIDS
FREQUENCY RANGE
GASES
GHZ RANGE
GHZ RANGE 01-100
HALIDES
HALOGEN COMPOUNDS
HYDROGEN
IONIZATION
KINETICS
MASS SPECTRA
MHZ RANGE
MHZ RANGE 01-100
MICROSCOPY
MOLECULE COLLISIONS
NONMETALS
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
PLASMA
PLASMA ARC SPRAYING
POLYMERIZATION
POWER INPUT
PRESSURE EFFECTS
RARE GASES
REACTION KINETICS
SCANNING ELECTRON MICROSCOPY
SEMIMETALS
SILICON
SILICON CHLORIDES
SILICON COMPOUNDS
SILICON SOLAR CELLS
SOLAR CELLS
SOLAR EQUIPMENT
SPECTRA
SPRAY COATING
SPRAYED COATINGS
SURFACE COATING
THIN FILMS