Thermal and ion-assisted reactions of Al/sub 0. 3/Ga/sub 0. 7/As with molecular chlorine
Conference
·
OSTI ID:6040159
Reaction of Al/sub 0.3/Ga/sub 0.7/As with molecular chlorine was studied with and without simultaneous bombardment by energetic argon ions. The reaction products signals were measured as functions of surface temperature. For the purely thermal reactions, the main products below 600/sup 0/K were AlCl/sub 3/, AsCl/sub 3/ and GaCl/sub 3/. The etching rates were two orders of magnitude lower than those of pure GaAs. With simultaneous ion bombardment, the reaction product signal of AsCl/sub 3/ at room temperature increased by almost a factor of four over the corresponding thermal reaction signal. The comparable enhancement factor for pure GaAs was approx.6.
- Research Organization:
- Lawrence Berkeley Lab., CA (USA); Lawrence Livermore National Lab., CA (USA)
- DOE Contract Number:
- AC03-76SF00098
- OSTI ID:
- 6040159
- Report Number(s):
- LBL-21214; CONF-860445-8; ON: DE86009925
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
36 MATERIALS SCIENCE
360603* -- Materials-- Properties
37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
400201 -- Chemical & Physicochemical Properties
ALUMINIUM ARSENIDES
ALUMINIUM COMPOUNDS
ARGON IONS
ARSENIC COMPOUNDS
ARSENIDES
CHARGED PARTICLES
CHEMICAL REACTIONS
CHLORINATION
CHLORINE
ELEMENTS
ENERGY RANGE
ETCHING
GALLIUM ARSENIDES
GALLIUM COMPOUNDS
HALOGENATION
HALOGENS
HETEROJUNCTIONS
IONS
JUNCTIONS
KEV RANGE
KEV RANGE 01-10
NONMETALS
PNICTIDES
SEMICONDUCTOR JUNCTIONS
SURFACE FINISHING
360603* -- Materials-- Properties
37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
400201 -- Chemical & Physicochemical Properties
ALUMINIUM ARSENIDES
ALUMINIUM COMPOUNDS
ARGON IONS
ARSENIC COMPOUNDS
ARSENIDES
CHARGED PARTICLES
CHEMICAL REACTIONS
CHLORINATION
CHLORINE
ELEMENTS
ENERGY RANGE
ETCHING
GALLIUM ARSENIDES
GALLIUM COMPOUNDS
HALOGENATION
HALOGENS
HETEROJUNCTIONS
IONS
JUNCTIONS
KEV RANGE
KEV RANGE 01-10
NONMETALS
PNICTIDES
SEMICONDUCTOR JUNCTIONS
SURFACE FINISHING