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Identification of a bistable defect in silicon: The carbon interstitial-carbon substitutional pair

Journal Article · · Appl. Phys. Lett.; (United States)
DOI:https://doi.org/10.1063/1.98717· OSTI ID:6038540
By using a combination of deep level transient spectroscopy (DLTS) and electron paramagnetic resonance techniques applied to samples of varying compositions, we identify the bistable defect at E/sub c/ -0.17 eV in irradiated n-type silicon as a carbon interstitial-carbon substitutional pair. It arises upon annealing of interstitial carbon, which is also the precursor to a remarkable recently discovered four-level multistable defect which we now tentatively identify as a carbon-phosphorus pair. We demonstrate a new simple method for distinguishing the bistable carbon-carbon pair defect from the oxygen-vacancy pair under the same DLTS peak.
Research Organization:
Department of Physics and Sherman Fairchild Laboratory, Lehigh University, Bethlehem, Pennsylvania 18015
OSTI ID:
6038540
Journal Information:
Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 51:15; ISSN APPLA
Country of Publication:
United States
Language:
English