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Very low threshold planar buried heterostructure InGaAsP/InP laser diodes prepared by three-stage metalorganic chemical vapor deposition

Journal Article · · Appl. Phys. Lett.; (United States)
DOI:https://doi.org/10.1063/1.98840· OSTI ID:6032295
Low threshold InGaAsP/InP lasers with planar buried heterostructure were grown entirely by low-pressure metalorganic chemical vapor deposition (MOCVD). The threshold current I/sub th/ = 10 mA and the differential quantum efficiency eta/sub d/ = 60%, which are comparable to lasers grown by liquid phase epitaxy, were obtained. Most lasers randomly selected from one wafer have threshold currents of I/sub th/ = 10--25 mA, because of high thickness uniformity of MOCVD growth. Stable fundamental transverse mode operation was also obtained up to an output power of 40 mW/facet, due to controlling the active layer width less than 2 ..mu..m.
Research Organization:
Opto-electronic Device Department, Matsushita Electronics Corporation, 1, Kohtariyakimachi, Nagaokakyo, Kyoto 617, Japan
OSTI ID:
6032295
Journal Information:
Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 51:12; ISSN APPLA
Country of Publication:
United States
Language:
English

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