Skip to main content
U.S. Department of Energy
Office of Scientific and Technical Information

Time-resolved studies of rapid solidification in highly undercooled molten silicon

Technical Report ·
OSTI ID:5994556
A KrF (248 nm) pulsed laser was used to melt 90-, 190-, and 440-nm thick amorphous silicon layers produced by Si ion implantation into (100) crystalline Si substrates. Time-resolved reflectivity measurements at two different probe wavelengths (633 nm and 1.15 ..mu..m) and post-irradiation TEM measurements were used to study the formation of an undercooled liquid Si phase and the subsequent solidification processes. The time-resolved measuremetns provide new experimental information about the nucleation of fine-grained Si crystallites in undercooled liquid Si, at low laser energy densities (E/sub l/), and about the growth of large-grained Si in the near-surface region at higher E/sub l/. Measurements with the infrared probe beam reveal the presence of a buried, propagating liquid layer at low E/sub l/. Model calculations indicate that this liquid layer is generated in part by the release of latent heat associated with the nucleation and growth process. 8 references, 4 figures.
Research Organization:
Oak Ridge National Lab., TN (USA)
DOE Contract Number:
AC05-84OR21400
OSTI ID:
5994556
Report Number(s):
CONF-841157-47; ON: DE85004857
Country of Publication:
United States
Language:
English