Thermalized ion explosion model for high energy sputtering and track registration
Thesis/Dissertation
·
OSTI ID:5987096
A velocity spectrum of neutral sputtered particles as well as a low resolution mass spectrum of sputtered molecular ions has been measured for 4.74 MeV /sup 19/F/sup +2/ incident on UF/sub 4/. The velocity spectrum is dramatically different from spectra taken with low energy (keV) bombarding ions, and is shown to be consistent with a hot plasma of atoms in thermal equilibrium inside the target. A thermalized ion explosion model is proposed for high energy sputtering which is also expected to describe track formation in dielectric materials. The model is shown to be consistent with the observed total sputtering yield and the dependence of the yield on the primary ionization rate of the incident ion.
- Research Organization:
- California Inst. of Tech., Pasadena (USA)
- OSTI ID:
- 5987096
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
640301* -- Atomic
Molecular & Chemical Physics-- Beams & their Reactions
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ACTINIDE COMPOUNDS
CHARGED PARTICLES
COLLISIONS
ENERGY RANGE
EQUILIBRIUM
FLUORIDES
FLUORINE COMPOUNDS
FLUORINE IONS
HALIDES
HALOGEN COMPOUNDS
IONIZATION
IONS
MASS SPECTRA
MATHEMATICAL MODELS
MEV RANGE
MEV RANGE 01-10
MOLECULAR IONS
PARTICLE TRACKS
SPECTRA
SPUTTERING
THERMAL EQUILIBRIUM
URANIUM COMPOUNDS
URANIUM FLUORIDES
Molecular & Chemical Physics-- Beams & their Reactions
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ACTINIDE COMPOUNDS
CHARGED PARTICLES
COLLISIONS
ENERGY RANGE
EQUILIBRIUM
FLUORIDES
FLUORINE COMPOUNDS
FLUORINE IONS
HALIDES
HALOGEN COMPOUNDS
IONIZATION
IONS
MASS SPECTRA
MATHEMATICAL MODELS
MEV RANGE
MEV RANGE 01-10
MOLECULAR IONS
PARTICLE TRACKS
SPECTRA
SPUTTERING
THERMAL EQUILIBRIUM
URANIUM COMPOUNDS
URANIUM FLUORIDES