Low-energy sputtering of teflon by oxygen-ion bombardment
Thesis/Dissertation
·
OSTI ID:5504538
The interaction of low energy oxygen ions (12 to 185 eV) with Teflon surfaces has been investigated using both continuous and pulsed produced by this bombardment. Strong signals were observed at 31, 50, and 69 amu, which are attributed to CF, CF{sub 2}, and CF{sub 3} molecules. The data support the conclusion that these molecules are not the direct products of the ion bombardment. Fluorine and carbon atoms are assumed to be the direct products, sputtered with such high velocities that the efficiency for their detection by the mass spectrometer is low. The CF, CF{sub 2}, and CF{sub 3} data obtained with continuous ion bombardment are used to deduce sputter yields (equivalent CF{sub 2} units removed per incident ion). These yields increase from 0.013 at 12 eV to 0.17 at 185 eV.
- Research Organization:
- Case Western Reserve Univ., Cleveland, OH (United States)
- OSTI ID:
- 5504538
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
665300* -- Interactions Between Beams & Condensed Matter-- (1992-)
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ATOMS
CARBON COMPOUNDS
CARBON FLUORIDES
CHARGED PARTICLES
COLLISIONS
ENERGY RANGE
EV RANGE
EV RANGE 10-100
EV RANGE 100-1000
FLUORIDES
FLUORINATED ALIPHATIC HYDROCARBONS
FLUORINE COMPOUNDS
HALIDES
HALOGEN COMPOUNDS
HALOGENATED ALIPHATIC HYDROCARBONS
IONS
MASS SPECTROMETERS
MATERIALS
MEASURING INSTRUMENTS
MOLECULES
ORGANIC COMPOUNDS
ORGANIC FLUORINE COMPOUNDS
ORGANIC HALOGEN COMPOUNDS
OXYGEN IONS
PETROCHEMICALS
PETROLEUM PRODUCTS
PLASTICS
POLY
POLYETHYLENES
POLYTETRAFLUOROETHYLENE
SPECTROMETERS
SPUTTERING
SYNTHETIC MATERIALS
TEFLON
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ATOMS
CARBON COMPOUNDS
CARBON FLUORIDES
CHARGED PARTICLES
COLLISIONS
ENERGY RANGE
EV RANGE
EV RANGE 10-100
EV RANGE 100-1000
FLUORIDES
FLUORINATED ALIPHATIC HYDROCARBONS
FLUORINE COMPOUNDS
HALIDES
HALOGEN COMPOUNDS
HALOGENATED ALIPHATIC HYDROCARBONS
IONS
MASS SPECTROMETERS
MATERIALS
MEASURING INSTRUMENTS
MOLECULES
ORGANIC COMPOUNDS
ORGANIC FLUORINE COMPOUNDS
ORGANIC HALOGEN COMPOUNDS
OXYGEN IONS
PETROCHEMICALS
PETROLEUM PRODUCTS
PLASTICS
POLY
POLYETHYLENES
POLYTETRAFLUOROETHYLENE
SPECTROMETERS
SPUTTERING
SYNTHETIC MATERIALS
TEFLON