Preparation and characterization of hydrogenated amorphous silicon thin films and thin film solar cells produced by ion plating techniques. Second quarterly progress report, 1 April 1979-30 Jun 1979
Using quartz substrates, hydrogenated a-Si thin films have now been produced both by flow discharge decomposition of silane and by the controlled ion plating of high purity silicon through flow discharges composed of silane, hydrogen, and argon using a modified Takagi apparatus. Thus far, thin films produced by both glow discharge decomposition of silane with and without magnetic confinement and by ion plating have been characterized and compared using x-ray diffractometry, infrared spectrometry, optical absorption spectroscopy and by their temperature dependence of resistivity. Based on these results, the ion plating technique of producing a-Si thin films looks extremely encouraging. Films have been produced at approximately ten times the decomposition rate obtained using glow discharge decomposition of silane, even with magnetic field containment. In addition the resulting thin film properties measured to date compare favorably with those obtained from glow discharge produced films.
- Research Organization:
- Duke Univ., Durham, NC (USA). Dept. of Mechanical Engineering and Materials Science
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC03-79ET23041
- OSTI ID:
- 5949198
- Report Number(s):
- DOE/ET/23041-2
- Country of Publication:
- United States
- Language:
- English
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Preparation and characterization of hydrogenated amorphous silicon thin films and thin film solar cells produced by ion plating techniques. Second quarterly progress report, 1 April-30 June 1979
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Related Subjects
36 MATERIALS SCIENCE
360601* -- Other Materials-- Preparation & Manufacture
ABSORPTIVITY
AMORPHOUS STATE
CHALCOGENIDES
DEPOSITION
DIRECT ENERGY CONVERTERS
ELECTRIC CONDUCTIVITY
ELECTRIC DISCHARGES
ELECTRICAL PROPERTIES
ELEMENTS
ENERGY GAP
GLOW DISCHARGES
HYDRIDES
HYDROGEN COMPOUNDS
LIGHT TRANSMISSION
MAGNETIC FIELDS
OPTICAL PROPERTIES
OXIDES
OXYGEN COMPOUNDS
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
PHYSICAL PROPERTIES
PLATING
QUARTZ
SEMIMETALS
SILANES
SILICON
SILICON COMPOUNDS
SILICON OXIDES
SILICON SOLAR CELLS
SOLAR CELLS
SUBSTRATES
SURFACE COATING
360601* -- Other Materials-- Preparation & Manufacture
ABSORPTIVITY
AMORPHOUS STATE
CHALCOGENIDES
DEPOSITION
DIRECT ENERGY CONVERTERS
ELECTRIC CONDUCTIVITY
ELECTRIC DISCHARGES
ELECTRICAL PROPERTIES
ELEMENTS
ENERGY GAP
GLOW DISCHARGES
HYDRIDES
HYDROGEN COMPOUNDS
LIGHT TRANSMISSION
MAGNETIC FIELDS
OPTICAL PROPERTIES
OXIDES
OXYGEN COMPOUNDS
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
PHYSICAL PROPERTIES
PLATING
QUARTZ
SEMIMETALS
SILANES
SILICON
SILICON COMPOUNDS
SILICON OXIDES
SILICON SOLAR CELLS
SOLAR CELLS
SUBSTRATES
SURFACE COATING