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Hydrogenated amorphous-silicon thin films produced by ion plating

Journal Article · · Appl. Phys. Lett.; (United States)
DOI:https://doi.org/10.1063/1.91363· OSTI ID:5417597
Ion plating techniques have been used to produce amorphous-silicon thin films which contain up to 25 atomic percent hydrogen. The Si--H bond stretching mode observed for hydrogenated amorphous-silicon thin films produced by glow-discharge decomposition methods is also observed for these ion-plated films. Optical absorptivity measurements for ion-plated films give band-gap values between 1.58 and 1.90 eV.
Research Organization:
Department of Mechanical Engineering and Materials Science, Duke University, Durham, North Carolina 27706
DOE Contract Number:
AC03-79ET23035
OSTI ID:
5417597
Journal Information:
Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 36:11; ISSN APPLA
Country of Publication:
United States
Language:
English