Cross-sectional transmission electron microscopy observation of Nb/AlO sub x -Al/Nb Josephson junctions

Journal Article · Sun Feb 10 23:00:00 EST 1991 · Applied Physics Letters; (USA)

DOI:https://doi.org/10.1063/1.104556· OSTI ID:5934196

Imamura, T; Hasuo, S ^[1]

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1. Fujitsu Laboratories Ltd., 10-1 Morinosato-Wakamiya, Atsugi 243-01, Japan (JP)

A study of microstructure of Nb/AlO{sub {ital x}}-Al/Nb Josephson junctions by cross-sectional transmission electron microscopy yielded much information regarding the junction barrier region. Both thick Nb and several-nanometer Al form polycrystalline films with columnar structures. Nb is oriented to the (110) plane, and Al is (111). The 200 nm lower Nb has a wavy surface with {similar to}5 nm smoothness, but its surface is planarized by several nanometers Al deposited on it. Thus AlO{sub {ital x}} with a smoothness under 1 nm can be formed on Al. The upper Nb has a good crystalline structure even just above the AlO{sub {ital x}} barrier.

• OSTI ID: 5934196
• Journal Information: Applied Physics Letters; (USA), Journal Name: Applied Physics Letters; (USA) Vol. 58:6; ISSN APPLA; ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360104 -- Metals & Alloys-- Physical Properties
360204 -- Ceramics
Cermets
& Refractories-- Physical Properties
426001* -- Engineering-- Superconducting Devices & Circuits-- (1990-)
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALUMINIUM COMPOUNDS
ALUMINIUM OXIDES
CHALCOGENIDES
CRYSTAL STRUCTURE
ELECTRON MICROSCOPY
ELEMENTS
JOSEPHSON EFFECT
JOSEPHSON JUNCTIONS
JUNCTIONS
METALS
MICROSCOPY
MICROSTRUCTURE
NIOBIUM
OXIDES
OXYGEN COMPOUNDS
SUPERCONDUCTING JUNCTIONS
TRANSITION ELEMENTS
TRANSMISSION ELECTRON MICROSCOPY