Cross-sectional TEM observation of Nb/AlOx-Al/Nb junction structures

Conference · Fri Mar 01 04:00:00 EST 1991 · IEEE Transactions on Magnetics (Institute of Electrical and Electronics Engineers); (United States)

OSTI ID:6089800

Imamura, T; Hasuo, S ^[1]

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1. Fujitsu Lab., Ltd., 10-1 Morinosato-Wakamiya, Atsugi 243-01 (JP)

This paper reports on a study of microstructure of Nb/AlO{sub x}---Al/Nb Josephson junctions by cross-sectional transmission electron microscopy (TEM) which yielded much information regarding the unction barrier region. Both thick Nb and several-nm Al form polycrystalline films with columnar structures. Nb is oriented to the (110) plane, and Al is (111). The 200-nm lower Nb has a wavy surface with {approximately}5 nm smoothness, but its surface is planarized by several-nm Al deposited on it. Thus AlO{sub x} with a smoothness under 1 nm can be formed on Al. The upper Nb has a good crystalline structure even just above the AlO{sub x} barrier.

• OSTI ID: 6089800
• Report Number(s): CONF-900944--
• Conference Information: Journal Name: IEEE Transactions on Magnetics (Institute of Electrical and Electronics Engineers); (United States) Journal Volume: 27:2
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360202 -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
665100 -- Nuclear Techniques in Condensed Matter Physics -- (1992-)
665412* -- Superconducting Devices-- (1992-)
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALUMINIUM
ALUMINIUM COMPOUNDS
ALUMINIUM OXIDES
CHALCOGENIDES
CRYSTAL STRUCTURE
DIFFUSION BARRIERS
ELECTRON MICROSCOPY
ELEMENTS
FILMS
JOSEPHSON JUNCTIONS
JUNCTIONS
METALS
MICROSCOPY
MICROSTRUCTURE
NIOBIUM
OXIDES
OXYGEN COMPOUNDS
SUPERCONDUCTING FILMS
SUPERCONDUCTING JUNCTIONS
TRANSITION ELEMENTS
TRANSMISSION ELECTRON MICROSCOPY