Multiple sextupole system for the correction of third and higher order aberration

Patent · Tue Jun 21 00:00:00 EDT 1983

OSTI ID:5917108

Crewe, A V

A means is provided for compensating for third and higher order aberration in charged particle beam devices. The means includes two sextupoles with an intermediate focusing lens, all positioned between two focusing lenses.

• Assignee: Dept. of Energy
• Patent Number(s): US 4389571
• OSTI ID: 5917108
• Resource Relation: Patent File Date: Filed date 1 Apr 1981; Other Information: PAT-APPL-249782
• Country of Publication: United States
• Language: English

Related Subjects

43 PARTICLE ACCELERATORS
BEAM FOCUSING MAGNETS
CORRECTIONS
CHARGED PARTICLE DETECTION
ELECTROMAGNETIC LENSES
ELECTRON MICROSCOPES
DETECTION
ELECTRICAL EQUIPMENT
ELECTROMAGNETS
EQUIPMENT
LENSES
MAGNETS
MICROSCOPES
RADIATION DETECTION
430200* - Particle Accelerators- Beam Dynamics
Field Calculations
& Ion Optics