Chemical vapor deposition of silicon nitride. I. Oxygen contamination
Conference
·
OSTI ID:5897588
Silicon nitride films are important to the microelectronics industry for their use as diffusion and passivation barriers, as well as in the development of non-volatile memories. In this work, the effects of oxygen contamination on the chemical vapor deposition of silicon-nitride are reported. The changes in deposition rate, etch rate, and refractive index are measured. From this data suitable process conrols can be established.
- Research Organization:
- Sandia Labs., Albuquerque, NM (USA)
- DOE Contract Number:
- EY-76-C-04-0789
- OSTI ID:
- 5897588
- Report Number(s):
- SAND-79-0097C; CONF-791017-4
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
14 SOLAR ENERGY
140501 -- Solar Energy Conversion-- Photovoltaic Conversion
36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360204 -- Ceramics
Cermets
& Refractories-- Physical Properties
360205 -- Ceramics
Cermets
& Refractories-- Corrosion & Erosion
AMMONIA
CHEMICAL COATING
CHEMICAL VAPOR DEPOSITION
COATINGS
CONTAMINATION
CRYOGENIC FLUIDS
DEPOSITION
DIFFUSION BARRIERS
DIRECT ENERGY CONVERTERS
ELECTRICAL PROPERTIES
ELECTRONIC CIRCUITS
ELEMENTS
FILMS
FLUIDS
HYDRIDES
HYDROGEN COMPOUNDS
INTEGRATED CIRCUITS
MICROELECTRONIC CIRCUITS
NITRIDES
NITROGEN COMPOUNDS
NITROGEN HYDRIDES
NONMETALS
OPTICAL PROPERTIES
OXYGEN
PASSIVATION
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
PHYSICAL PROPERTIES
PNICTIDES
REFLECTIVITY
SILANES
SILICON COMPOUNDS
SILICON NITRIDES
SOLAR CELLS
SURFACE COATING
SURFACE PROPERTIES
SYNTHESIS
VAPOR DEPOSITED COATINGS
140501 -- Solar Energy Conversion-- Photovoltaic Conversion
36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360204 -- Ceramics
Cermets
& Refractories-- Physical Properties
360205 -- Ceramics
Cermets
& Refractories-- Corrosion & Erosion
AMMONIA
CHEMICAL COATING
CHEMICAL VAPOR DEPOSITION
COATINGS
CONTAMINATION
CRYOGENIC FLUIDS
DEPOSITION
DIFFUSION BARRIERS
DIRECT ENERGY CONVERTERS
ELECTRICAL PROPERTIES
ELECTRONIC CIRCUITS
ELEMENTS
FILMS
FLUIDS
HYDRIDES
HYDROGEN COMPOUNDS
INTEGRATED CIRCUITS
MICROELECTRONIC CIRCUITS
NITRIDES
NITROGEN COMPOUNDS
NITROGEN HYDRIDES
NONMETALS
OPTICAL PROPERTIES
OXYGEN
PASSIVATION
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
PHYSICAL PROPERTIES
PNICTIDES
REFLECTIVITY
SILANES
SILICON COMPOUNDS
SILICON NITRIDES
SOLAR CELLS
SURFACE COATING
SURFACE PROPERTIES
SYNTHESIS
VAPOR DEPOSITED COATINGS