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Dual-transistor method to determine threshold-voltage shifts due to oxide-trapped charge and interface traps in metal-oxide-semiconductor devices

Journal Article · · Appl. Phys. Lett.; (United States)
DOI:https://doi.org/10.1063/1.101854· OSTI ID:5884573

A new technique is proposed to evaluate the radiation response of metal-oxide-semiconductor (MOS) transistors. The method requires that otherwise identical /ital n/- and /ital p/-channel transistors be irradiated under the same conditions. Using assumptions similar to those of widely accepted ''single-transistor'' methods, standard threshold-voltage and mobility measurements are combined to accurately estimate threshold-voltage shifts due to oxide-trapped charge and interface traps. This approach is verified for several MOS processes. The dual-transistor method can be applied to devices with much larger parasitic leakage, and at shorter times following a radiation pulse, than subthreshold current or charge-pumping techniques.

Research Organization:
Sandia National Laboratories, Albuquerque, New Mexico 87185(US)
DOE Contract Number:
AC04-76DP00789
OSTI ID:
5884573
Journal Information:
Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 55:5; ISSN APPLA
Country of Publication:
United States
Language:
English

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