RHEED streaks and instrument response

Journal Article · Fri Apr 01 04:00:00 EST 1983 · J. Vac. Sci. Technol., A; (United States)

DOI:https://doi.org/10.1116/1.571968· OSTI ID:5865949

Van Hove, J M; Pukite, P; Cohen, P I; Lent, C S

Reflection high-energy electron diffraction (RHEED) is so sensitive to surface morphology that it is difficult to separate the roles of instrument response and surface imperfection in the diffraction. To address this difficulty we have used MBE grown GaAs(001) as a test surface to study the angular dimensions of the diffracted beams. This is important if RHEED is to be useful as a quantitive probe of surface structure for in situ studies of crystal growth. The limitations placed by instrumental uncertainties on the maximum resolvable distance are estimated. Measurements of the angular length of the RHEED steaks versus angle of incidence are presented which show the changes expected from a combination of a uniformly broadened reciprocal lattice rod and an instrument limit due to angular uncertainties. Resolvable distances are obtained with RHEED that are much larger than those typically obtained with low-energy electron diffraction.

• Research Organization: Department of Electrical Engineering, University of Minnesota, Minneapolis, Minnesota 55455
• DOE Contract Number: AC02-80ER10583
• OSTI ID: 5865949
• Journal Information: J. Vac. Sci. Technol., A; (United States), Journal Name: J. Vac. Sci. Technol., A; (United States) Vol. 1:2; ISSN JVTAD
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360602* -- Other Materials-- Structure & Phase Studies
ACCURACY
ARSENIC COMPOUNDS
ARSENIDES
COHERENT SCATTERING
DIFFRACTION
ELECTRON DIFFRACTION
ENERGY RANGE
EPITAXY
GALLIUM ARSENIDES
GALLIUM COMPOUNDS
INCIDENCE ANGLE
KEV RANGE
KEV RANGE 10-100
MOLECULAR BEAM EPITAXY
PNICTIDES
SCATTERING