Hydrogen-induced features in the Auger spectra from amorphous silicon

Journal Article · Fri Apr 01 04:00:00 EST 1983 · J. Vac. Sci. Technol., A; (United States)

DOI:https://doi.org/10.1116/1.571899· OSTI ID:5865739

Madden, H H

Si-L/sub 23/VV spectra have been measured for hydrogenated amorphous silicon (a-Si:H) surfaces produced by direct ion bombardment (IB) with mixed hydrogen/argon ion beams. Interpretation of the hydrogen-induced features in the loss-corrected, integral spectra could be made by comparisons of the a-Si:H spectra with corresponding spectra from clean ordered Si surfaces, from an ordered dihydride surface system, from amorphous surfaces produced by argon IB, and by comparisons with theoretical density-of-states calculations for a-Si:H. As is the case with the ordered, chemisorbed hydrogen system, hydrogen causes a decrease in intensity on the high energy side of the Auger signal. This decrease indicates a tying off of ''dangling bonds.'' In the a-Si:H system, however, this effect is in competition with the effects of surface damage produced by the IB which can result in a net increase in high energy signal intensity. At lower energies the a-Si:H signals exhibit both of the two broad Si--H bonding features noted for the ordered dihydride surface and a third, weaker feature at still lower energies.

• Research Organization: Sandia National Laboratories, Albuquerque, New Mexico 87185
• DOE Contract Number: AC04-76DP00789
• OSTI ID: 5865739
• Journal Information: J. Vac. Sci. Technol., A; (United States), Journal Name: J. Vac. Sci. Technol., A; (United States) Vol. 1:2; ISSN JVTAD
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360603* -- Materials-- Properties
AMORPHOUS STATE
ARGON IONS
AUGER ELECTRON SPECTROSCOPY
BEAMS
CHARGED PARTICLES
CHEMICAL BONDS
CHEMICAL REACTIONS
CHEMISORPTION
COLLISIONS
ELECTRON SPECTROSCOPY
ELEMENTS
ENERGY-LEVEL DENSITY
HOLES
HYDRIDES
HYDROGEN
HYDROGEN COMPOUNDS
HYDROGEN IONS
HYDROGENATION
ION BEAMS
ION COLLISIONS
IONS
NONMETALS
SEMIMETALS
SEPARATION PROCESSES
SILANES
SILICON
SILICON COMPOUNDS
SORPTION
SPECTROSCOPY
SPUTTERING
SURFACES
SYNTHESIS
VALENCE