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Molecular beam source for high vapor pressure materials

Journal Article · · J. Vac. Sci. Technol.; (United States)
DOI:https://doi.org/10.1116/1.571346· OSTI ID:5848762
;
A molecular beam source for deposition of high vapor pressure materials in MBE systems is described. The source consists of a collimating effusion cell of original design which is heated by a temperature-controlled Radak II oven (Luxel Corporation). Construction details of the source are given along with calibration and performance data.
Research Organization:
Department of Physics, North Carolina State University, Raleigh, North Carolina 27650
OSTI ID:
5848762
Journal Information:
J. Vac. Sci. Technol.; (United States), Journal Name: J. Vac. Sci. Technol.; (United States) Vol. 20:2; ISSN JVSTA
Country of Publication:
United States
Language:
English

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Related Subjects

640301* -- Atomic
Molecular & Chemical Physics-- Beams & their Reactions
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
BEAM PRODUCTION
BEAMS
CADMIUM
CALIBRATION
CHEMICAL COATING
CHEMICAL VAPOR DEPOSITION
CONSTRUCTION
DEPOSITION
DESIGN
ELEMENTS
EPITAXY
FABRICATION
FILMS
METALS
MOLECULAR BEAMS
PERFORMANCE
SEMIMETALS
SURFACE COATING
TELLURIUM