Free-standing polycrystalline boron phosphide film and method for production thereof
Patent
·
OSTI ID:5827636
A process for producing a free-standing polycrystalline boron phosphide film comprises growing a film of boron phosphide in a vertical growth apparatus on a metal substrate. The metal substrate has a coefficient of thermal expansion sufficiently different from that of boron phosphide that the film separates cleanly from the substrate upon cooling thereof, and the substrate is preferably titanium. The invention also comprises a free-standing polycrystalline boron phosphide film for use in electronic device fabrication.
- DOE Contract Number:
- AC04-76DP00789
- Assignee:
- SNL; ERA-08-054285; EDB-83-177672
- Patent Number(s):
- None
- Application Number:
- ON: DE83018104
- OSTI ID:
- 5827636
- Country of Publication:
- United States
- Language:
- English
Similar Records
Method for production of free-standing polycrystalline boron phosphide film
Method for production of free standing polycrystalline boron phosphide film
Thin boron phosphide coating as a corrosion-resistant layer
Patent
·
Mon Dec 31 23:00:00 EST 1984
·
OSTI ID:865656
Method for production of free standing polycrystalline boron phosphide film
Patent
·
Mon Oct 28 23:00:00 EST 1985
·
OSTI ID:5830300
Thin boron phosphide coating as a corrosion-resistant layer
Patent
·
Wed Aug 25 00:00:00 EDT 1982
·
OSTI ID:6206980