High resolution x-ray diffraction from epitaxial gallium nitride films
Book
·
OSTI ID:581085
- Bede Scientific, Durham (United Kingdom)
The width of double axis X-ray rocking curves of epitaxial GaN layers is shown to be critically dependent on the width of the detector aperture. The authors show that triple axis diffraction measurements using a crystal analyzer before the detector enables the instrument function to be defined and the tilt and dilation distributions separated. All GaN samples examined showed a mosaic blocks. In reciprocal space maps this was revealed as a wide distribution of intensity in a direction perpendicular to the reciprocal lattice vector.
- OSTI ID:
- 581085
- Report Number(s):
- CONF-961202--; ISBN 1-55899-353-3
- Country of Publication:
- United States
- Language:
- English
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