Low energy X-ray spectra measured with a mercuric iodide energy dispersive spectrometer in a scanning electron microscope

Conference · Fri Jan 31 23:00:00 EST 1986 · IEEE Trans. Nucl. Sci.; (United States)

OSTI ID:5810163

Iwanczyk, J S; Dabrowski, A J; Huth, G C; Bradley, J G; Conlay, J M; Albee, A L

A mercuric iodide energy dispersive x-ray spectrometer, with Peltier cooling provided for the detector and input field effect transistor, has been developed and tested in a scanning electron microscope. X-ray spectra were obtained with the 15 keV electron beam. An energy resolution of 225 eV (FWHM) for Mn-K..cap alpha.. at 5.9 keV and 195 eV (FWHM) for Mg-K line at 1.25 keV has been measured. Overall system noise level was 175 eV (FWHM). The detector system characterization with a carbon target demonstrated good energy sensitivity at low energies and lack of significant spectral artifacts at higher energies.

• Research Organization: Univ. of Southern California, Inst. of Physics, 4676 Admiralty Way, Suite 932, Marina del Rey, CA 90292
• OSTI ID: 5810163
• Report Number(s): CONF-851009-
• Journal Information: IEEE Trans. Nucl. Sci.; (United States), Journal Name: IEEE Trans. Nucl. Sci.; (United States) Vol. NS-33:1; ISSN IETNA
• Country of Publication: United States
• Language: English

Related Subjects

440300* -- Miscellaneous Instruments-- (-1989)
47 OTHER INSTRUMENTATION
ALKALI METALS
ALKALINE EARTH METALS
BEAMS
CARBON
COOLING
ELECTRON BEAMS
ELECTRON MICROSCOPY
ELEMENTS
ENERGY RANGE
ENERGY RESOLUTION
EV RANGE
EV RANGE 100-1000
FIELD EFFECT TRANSISTORS
HALIDES
HALOGEN COMPOUNDS
HGI2 SEMICONDUCTOR DETECTORS
IODIDES
IODINE COMPOUNDS
KEV RANGE
KEV RANGE 10-100
LEPTON BEAMS
MAGNESIUM
MEASURING INSTRUMENTS
MERCURY COMPOUNDS
MERCURY HALIDES
MERCURY IODIDES
METALS
MICROSCOPY
NOISE
NONMETALS
PARTICLE BEAMS
PERFORMANCE TESTING
POTASSIUM
RADIATION DETECTORS
RESOLUTION
SCANNING ELECTRON MICROSCOPY
SEMICONDUCTOR DETECTORS
SEMICONDUCTOR DEVICES
SENSITIVITY
SPECTRA
SPECTROMETERS
TESTING
TRANSISTORS
X-RAY SPECTRA
X-RAY SPECTROMETERS