Low energy x-ray spectra measured with a mercuric iodide energy dispersive spectrometer in a scanning electron microscope

Conference · Mon Dec 31 23:00:00 EST 1984

OSTI ID:5624810

Iwanczyk, J S; Dabrowski, A J; Huth, G C; Bradley, J G; Conley, J M; Albee, A L

A mercuric iodide energy dispersive x-ray spectrometer, with Peltier cooling provided for the detector and input field effect transistor, has been developed and tested in a scanning electron microscope. X-ray spectra were obtained with the 15 keV electron beam. An energy resolution of 225 eV (FWHM) for Mn-K/sub ..cap alpha../ at 5.9 keV and 195 eV (FWHM) for Mg-K line at 1.25 keV has been measured. Overall system noise level was 175 eV (FWHM). The detector system characterization with a carbon target demonstrated good energy sensitivity at low energies and lack of significant spectral artifacts at higher energies. 16 refs., 5 figs.

• Research Organization: University of Southern California, Marina Del Rey (USA). Inst. of Physics; Jet Propulsion Lab., Pasadena, CA (USA); California Inst. of Tech., Pasadena (USA)
• DOE Contract Number: AT03-77EV72031
• OSTI ID: 5624810
• Report Number(s): CONF-851009-72; ON: DE86011963
• Country of Publication: United States
• Language: English

Related Subjects

440103* -- Radiation Instrumentation-- Nuclear Spectroscopic Instrumentation
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
640304 -- Atomic
Molecular & Chemical Physics-- Collision Phenomena
74 ATOMIC AND MOLECULAR PHYSICS
BEAMS
CARBON
COPPER
DATA
DESIGN
ELECTRON BEAMS
ELECTRON MICROSCOPY
ELEMENTS
ENERGY RANGE
EXPERIMENTAL DATA
FANO FACTOR
FIELD EFFECT TRANSISTORS
HALIDES
HALOGEN COMPOUNDS
INFORMATION
IODIDES
IODINE COMPOUNDS
KEV RANGE
KEV RANGE 01-10
LEPTON BEAMS
MANGANESE
MEASURING INSTRUMENTS
MERCURY COMPOUNDS
MERCURY HALIDES
MERCURY IODIDES
METALS
MICROSCOPY
NONMETALS
NUMERICAL DATA
PARTICLE BEAMS
SCANNING ELECTRON MICROSCOPY
SEMICONDUCTOR DEVICES
SPECTRA
SPECTROMETERS
TESTING
TRANSISTORS
TRANSITION ELEMENTS
X-RAY SPECTRA
X-RAY SPECTROMETERS