Silicon solar cells fabricated by ion implantation and laser annealing
Journal Article
·
· J. Appl. Phys.; (United States)
Silicon solar cells are fabricated using ion implantation and laser annealing. An AM1 conversion efficiency of 10.5% was obtained without an anti-reflection coating for a cell ion-implanted with 4 x 10/sup 15/ protons/cm/sup 2/ at 25 keV and laser annealed using a W-switched ruby laser. This efficiency increases after low-temperature furnace annealing as a result of an increase in the open-circuit voltage (V/sub oc/) and the fill factor. The dependence of V/sub oc/ on the furnace annealing temperature was examined by diode-characteristic measurements and deep-level transient spectroscopy. The fact that V/sub oc/ increases and the diode reverse-current density decreases as the furnace annealing-temperature increases is related to the decrease in the number of residual defects near the junction. 8 references.
- Research Organization:
- Hitachi, Ltd., Tokyo, Japan
- OSTI ID:
- 5805008
- Journal Information:
- J. Appl. Phys.; (United States), Journal Name: J. Appl. Phys.; (United States) Vol. 19; ISSN JAPIA
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
14 SOLAR ENERGY
140501* -- Solar Energy Conversion-- Photovoltaic Conversion
ANNEALING
CURRENT DENSITY
DEFECTS
DIRECT ENERGY CONVERTERS
EQUIPMENT
FABRICATION
HEAT TREATMENTS
ION IMPLANTATION
LASERS
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
RUBY LASERS
SILICON SOLAR CELLS
SOLAR CELLS
SOLAR EQUIPMENT
SOLID STATE LASERS
140501* -- Solar Energy Conversion-- Photovoltaic Conversion
ANNEALING
CURRENT DENSITY
DEFECTS
DIRECT ENERGY CONVERTERS
EQUIPMENT
FABRICATION
HEAT TREATMENTS
ION IMPLANTATION
LASERS
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
RUBY LASERS
SILICON SOLAR CELLS
SOLAR CELLS
SOLAR EQUIPMENT
SOLID STATE LASERS