Superconducting and structural properties of sputtered thin films of YBa/sub 2/Cu/sub 3/O/sub 7-//sub x/

Journal Article · Mon Dec 21 04:00:00 EST 1987 · Appl. Phys. Lett.; (United States)

DOI:https://doi.org/10.1063/1.98929· OSTI ID:5798366

Makous, J L; Maritato, L; Falco, C M; Cronin, J P; Rajendran, G P; Uhlmann, E V; Uhlmann, D R

We have fabricated thin films of YBa/sub 2/Cu/sub 3/O/sub x/ by dc triode sputtering from two metallic targets. Post-annealing in pure O/sub 2/ after sputtering resulted in superconducting films with a T/sub c/ onset as high as 89 K and a midpoint T/sub c/ of 75 K. We report preliminary results of films deposited on sapphire, MgO and sol-gel coatings of ZrO/sub 2/ on sapphire, with and without buffer layers of Ag. The chemical and physical structures of these films were analyzed by using several x-ray diffraction techniques and Rutherford backscattering spectroscopy.

• Research Organization: Department of Physics, Optical Sciences Center, Arizona Research Laboratories, University of Arizona, Tucson, Arizona 85721
• OSTI ID: 5798366
• Journal Information: Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 51:25; ISSN APPLA
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360201 -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360202 -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
360204* -- Ceramics
Cermets
& Refractories-- Physical Properties
ALKALINE EARTH METAL COMPOUNDS
ALUMINIUM COMPOUNDS
ALUMINIUM OXIDES
ANNEALING
BACKSCATTERING
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
COATINGS
COHERENT SCATTERING
COPPER COMPOUNDS
COPPER OXIDES
CORUNDUM
CRYSTAL STRUCTURE
DATA
DIFFRACTION
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
EXPERIMENTAL DATA
FABRICATION
FILMS
HEAT TREATMENTS
INFORMATION
MAGNESIUM COMPOUNDS
MAGNESIUM OXIDES
MINERALS
NUMERICAL DATA
OXIDE MINERALS
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
SAPPHIRE
SCATTERING
SPUTTERING
SUPERCONDUCTING FILMS
SUPERCONDUCTIVITY
THERMODYNAMIC PROPERTIES
THIN FILMS
TRANSITION ELEMENT COMPOUNDS
TRANSITION TEMPERATURE
VAPOR DEPOSITED COATINGS
X-RAY DIFFRACTION
YTTRIUM COMPOUNDS
YTTRIUM OXIDES
ZIRCONIUM COMPOUNDS
ZIRCONIUM OXIDES