Thin film polycrystalline silicon solar cells. Quarterly report No. 2, 1 January 1979-30 March 1979

Technical Report · Mon Jan 01 00:00:00 EST 1979

DOI:https://doi.org/10.2172/5779643· OSTI ID:5779643

Sarma, K. R.; Rice, M. J.; Legge, R.; Ramsey, W. C.

A composite substrate concept was developed and shear separation successfully demonstrated. This substrate consists of a main molybdenum substrate, a thin (approx. 1 ..mu..m) SiO/sub 2/ barrier layer and a thin (approx. 3000A) Mo layer. The thin Mo layer gets converted to MoSi/sub 2/ and acts as a shear separation layer. This composite substrate shows promise for substantial improvement in recyclability and the quality of silicon ribbons produced. Effects of SiHCl/sub 3/ concentration, total reactant flow rate, beam rf power, substrate temperature and gravity on energy beam deposition were investigated. The deposition efficiency was found to be a strong function of input chlorosilane concentration. Rotating nozzle deposition was also studied. Problems were encountered in the use of the rotating nozzle due to improper impedance matching with the nozzle assembly. This required redesign of the rotating assembly to improve impedance matching. EBD silicon ribbons were grain enhanced by RTR recrystallization and successfully gettered by a two sided phosphorous diffusion which resulted in diffusion lengths ranging up to 75 ..mu..m. Solar cells, 1 x 2 cm in area were fabricated on these silicon ribbons; they exhibited conversion efficiencies of up to 10.1% with a V/sub OC/ of 0.54V, J/sub SC/ of 29.5 mA/cm/sup 2/ and a FF of 63%.

• Research Organization: Motorola, Inc., Phoenix, AZ (USA). Solar Energy Dept.
• DOE Contract Number: ET-78-C-03-2207
• OSTI ID: 5779643
• Report Number(s): SAN-2207-T3
• Country of Publication: United States
• Language: English

Related Subjects

14 SOLAR ENERGY
36 MATERIALS SCIENCE
SILICON
ENERGY BEAM DEPOSITION
SILICON SOLAR CELLS
FABRICATION
COMPOSITE MATERIALS
DIFFUSION
DIFFUSION LENGTH
EFFICIENCY
ENERGY BEAM DEPOSITION FILMS
GETTERING
LAYERS
MOLYBDENUM
PHOSPHORUS
POLYCRYSTALS
RECRYSTALLIZATION
SILANES
SILICON OXIDES
SUBSTRATES
CHALCOGENIDES
COATINGS
CRYSTALS
DEPOSITION
DIRECT ENERGY CONVERTERS
ELEMENTS
EQUIPMENT
FILMS
HYDRIDES
HYDROGEN COMPOUNDS
METALS
NONMETALS
OXIDES
OXYGEN COMPOUNDS
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
REFRACTORY METALS
SEMIMETALS
SILICON COMPOUNDS
SOLAR CELLS
SOLAR EQUIPMENT
SURFACE COATING
TRANSITION ELEMENTS
140501* - Solar Energy Conversion- Photovoltaic Conversion
360601 - Other Materials- Preparation & Manufacture