YBa sub 2 Cu sub 3 O sub x -microstructures on semiconductor substrates

Conference · Fri Mar 01 04:00:00 EST 1991 · IEEE Transactions on Magnetics (Institute of Electrical and Electronics Engineers); (United States)

OSTI ID:5766176

Schilling, M; Merkt, U ^[1]

---

1. Hamburg Univ. (Germany). Inst. fuer Angewandte Physik

Thin films of YBa{sub 2}Cu{sub 3}O{sub x} are prepared by laser ablation with a KrF excimer laser on Si and GaAs. These films show degraded superconducting properties compared to our films on SrTiO{sub 3} which exhibit critical temperatures T{sub co} = 89 K and critical current densities j{sub c}(77 K) in the 10{sup 6} A/cm{sup 2} range. Critical temperatures of 57 K and 30 K for films on Si and GaAs, respectively, could be achieved. On SrTiO{sub 3} the authors prepare YBa{sub 2}Cu{sub 3}O{sub x} microbridges with widths down to 10 {mu}m by wet chemical etching or by laser ablation through metal masks. Patterning of films on bare Si however, is complicated by microcracks in the film due to different lattice constants and thermal expansion coefficients of Si and YBa{sub 2}Cu{sub 3}O{sub x}. These problems may be overcome by the use of buffer layers whose influence on the film quality is also studied in this paper.

• OSTI ID: 5766176
• Report Number(s): CONF-900944--
• Conference Information: Journal Name: IEEE Transactions on Magnetics (Institute of Electrical and Electronics Engineers); (United States) Journal Volume: 27:2
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360207* -- Ceramics
Cermets
& Refractories-- Superconducting Properties-- (1992-)
ABLATION
ALKALINE EARTH METAL COMPOUNDS
ARSENIC COMPOUNDS
ARSENIDES
BARIUM COMPOUNDS
BARIUM OXIDES
BUFFERS
CHALCOGENIDES
COPPER COMPOUNDS
COPPER OXIDES
CRITICAL CURRENT
CRYSTAL STRUCTURE
CURRENT DENSITY
CURRENTS
ELECTRIC CONDUCTIVITY
ELECTRIC CURRENTS
ELECTRICAL PROPERTIES
ELEMENTS
EXCIMER LASERS
FILMS
GALLIUM ARSENIDES
GALLIUM COMPOUNDS
GAS LASERS
KRYPTON FLUORIDE LASERS
LASERS
MATERIALS
MICROSTRUCTURE
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
PNICTIDES
SEMICONDUCTOR MATERIALS
SEMIMETALS
SILICON
STRONTIUM COMPOUNDS
STRONTIUM OXIDES
SUBSTRATES
SUPERCONDUCTIVITY
THIN FILMS
TITANIUM COMPOUNDS
TITANIUM OXIDES
TRANSITION ELEMENT COMPOUNDS
YTTRIUM COMPOUNDS
YTTRIUM OXIDES