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Characterization of MeV ion-implanted GaInAs/GaAs using x-ray and Raman techniques

Technical Report ·
OSTI ID:5763265
Lattice relaxation, elastic strain, and phonon shifts are studied in as-grown, MeV ion-implanted, and thermally annealed strained GaInAs layers on GaAs(001) substrates. The degree of lattice relaxation for the as-grown samples is discussed in terms of the measured in-plane lattice constants and the calculated critical thickness. For the 15-MeV Cl or 9-MeV P ion-bombarded GaInAs/GaAs, the beam induced elastic strains and beam induced phonon shifts are measured and discussed for samples with different degrees of initial relaxation. Thermal annealing on the as-grown and the ion-implanted GaInAs layers indicates a substantial thermal loss of indium in the thin surface layers and a full recovery of radiation damage in the GaInAs layers by 500 C.
Research Organization:
State Univ. of New York, Buffalo, NY (USA). Dept. of Electrical and Computer Engineering
OSTI ID:
5763265
Report Number(s):
AD-A-207063/9/XAB
Country of Publication:
United States
Language:
English