Reactions of tungsten-titanium alloys with decomposition products from a glow UHF discharge in a tetrafluoromethane-oxygen mixture

Journal Article · Fri Jul 01 04:00:00 EDT 1988 · High Energy Chem. (Engl. Transl.); (United States)

OSTI ID:5760621

Amirov, I I; Vinogradov, G K; Slovetskii, D I

Decomposition products from tetrafluoromethane mixed with oxygen react with WTi alloy in an HF glow discharge, the extent of reaction being dependent on the atomic fluorine concentration, temperature, and surface potential. The rates of reaction with the CF/sub 4/ products are proportional to the atomic fluorine concentrations. The effective activation energies have been determined for the atomic fluorine reacting with the alloy components in various gases. The metal removal rate increases when the specimen is negative with respect to the plasma potential, which is ascribed to the surface being bombarded by positive ions or to the electric field affecting the surface reaction rates.

• OSTI ID: 5760621
• Journal Information: High Energy Chem. (Engl. Transl.); (United States), Journal Name: High Energy Chem. (Engl. Transl.); (United States) Vol. 22:1; ISSN HIECA
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360102 -- Metals & Alloys-- Structure & Phase Studies
37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
400800* -- Combustion
Pyrolysis
& High-Temperature Chemistry
ACTIVATION ENERGY
ALLOYS
ARGON
CARBON TETRAFLUORIDE
CHEMICAL REACTION KINETICS
CHEMICAL REACTIONS
DECOMPOSITION
ELECTRIC DISCHARGES
ELEMENTS
ENERGY
EROSION
ETCHING
FLUIDS
FLUORIDES
FLUORINATED ALIPHATIC HYDROCARBONS
FLUORINE
FLUORINE COMPOUNDS
GASES
GLOW DISCHARGES
HALIDES
HALOGEN COMPOUNDS
HALOGENATED ALIPHATIC HYDROCARBONS
HALOGENS
IONIZATION
KINETICS
NONMETALS
ORGANIC COMPOUNDS
ORGANIC FLUORINE COMPOUNDS
ORGANIC HALOGEN COMPOUNDS
OXYGEN
RARE GASES
REACTION KINETICS
REFRACTORY METAL COMPOUNDS
SPUTTERING
SURFACE FINISHING
TITANIUM ALLOYS
TITANIUM COMPOUNDS
TITANIUM FLUORIDES
TRANSITION ELEMENT COMPOUNDS
TUNGSTEN ALLOYS
TUNGSTEN COMPOUNDS
TUNGSTEN FLUORIDES
VOLATILITY