Spectroscopic study of chemical composition of high-frequency glow-discharge in halogen-containing gas mixtures

Journal Article · Sat Mar 01 04:00:00 EST 1986 · J. Appl. Spectrosc. (Engl. Transl.); (United States)

OSTI ID:5331485

Gushchin, O P; Dolgopolov, V M; Pereverzev, L E; Slovetskii, D I

This paper presents a spectroscopic study of high-frequency (HF) gas discharge in mixtures of fluorine- and chlorine-containing gases: trichlorotrifluoroethane (C/sub 2/F/sub 3/Cl/sub 3/), sulfur hexafluoride (SF/sub 6/), and tetrafluoromethane (CF/sub 4/). The optical emission spectrum of the plasma was recorded in the range of 200-800 nm by the photoelectric method, using an MDR-23 monochromator, FEU-79 and FEU-39A radiation dectectors. A small amount of argon was added to the plasma-forming gas to determine the concentration of atoms and radicals and change in the plasma parameters when the discharge burning regimes are changed. The experiments showed that the most probable molecule emitting the 280-335-nm band with a maximum at lambdamax = 306 nm is si /SUB x/ S /SUB y/ Fz. It can be formed as a result of the interaction of sulfur-fluorine containing radicals with the silicon surface, or in the bulk of the material, due to the reaction of SiF /SUB m/ and SF /SUB n/ radicals.

• OSTI ID: 5331485
• Journal Information: J. Appl. Spectrosc. (Engl. Transl.); (United States), Journal Name: J. Appl. Spectrosc. (Engl. Transl.); (United States) Vol. 43:3; ISSN JASYA
• Country of Publication: United States
• Language: English

Related Subjects

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
400301* -- Organic Chemistry-- Chemical & Physicochemical Properties-- (-1987)
640304 -- Atomic
Molecular & Chemical Physics-- Collision Phenomena
74 ATOMIC AND MOLECULAR PHYSICS
ARGON
CARBON TETRAFLUORIDE
CHEMICAL COMPOSITION
CHLORINATED ALIPHATIC HYDROCARBONS
COLLISIONS
DISPERSIONS
ELECTRIC DISCHARGES
ELECTRON COLLISIONS
ELECTRON-MOLECULE COLLISIONS
ELEMENTS
EMISSION SPECTRA
ENERGY-LEVEL TRANSITIONS
EXCITATION
FLUIDS
FLUORIDES
FLUORINATED ALIPHATIC HYDROCARBONS
FLUORINE COMPOUNDS
GASES
HALIDES
HALOGEN COMPOUNDS
HALOGENATED ALIPHATIC HYDROCARBONS
HIGH-FREQUENCY DISCHARGES
IONIZATION
MIXTURES
MOLECULE COLLISIONS
MONOCHROMATORS
NONMETALS
ORGANIC CHLORINE COMPOUNDS
ORGANIC COMPOUNDS
ORGANIC FLUORINE COMPOUNDS
ORGANIC HALOGEN COMPOUNDS
PHOTODETECTORS
PLASMA DIAGNOSTICS
RARE GASES
REACTION INTERMEDIATES
SILICON COMPOUNDS
SPECTRA
SULFUR COMPOUNDS
SULFUR FLUORIDES