A study of deposited YBaCuO thin films by D. C. magnetron sputtering

Journal Article · Fri Jan 01 04:00:00 EST 1988 · Modern Physics Letters B; (USA)

DOI:https://doi.org/10.1142/S0217984988001417· OSTI ID:5733727

Shi, W; Sun, J; Yao, W; Jiang, J; Liu, L; Yin, H; Qi, Z ^[1]

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1. Academia Sinica, Hefei, AH (China). Inst. of Plasma Physics

The YBaCuO thin films with critical transition temperature above 77{Kappa} (in their experiments, they are 83{Kappa}) have been prepared successfully. The sintered oxides of Y, Ba and Cu with proper composition was used as target. To control the parameters during sputtering deposition processes is very important to obtain high T/sub c/ thin film. The composition and phase structure were investigated by means of X-fluoroscope, electron-probe and X-ray diffractometer. The second ions spectroscopies of film and bulk sample were investigated using SIMS. It is clear that thin films lost their oxygen more easily under bombardment of Ar/sup +/ with certain energy.

• OSTI ID: 5733727
• Journal Information: Modern Physics Letters B; (USA), Journal Name: Modern Physics Letters B; (USA) Vol. 1:9; ISSN MPLBE; ISSN 0217-9849
• Country of Publication: United States
• Language: English

Related Subjects

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71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METAL COMPOUNDS
ARGON IONS
BARIUM COMPOUNDS
BARIUM OXIDES
BIOMEDICAL RADIOGRAPHY
CHALCOGENIDES
CHARGED PARTICLES
CHEMICAL COMPOSITION
COHERENT SCATTERING
COPPER COMPOUNDS
COPPER OXIDES
CRITICAL TEMPERATURE
CRYSTAL DEFECTS
CRYSTAL STRUCTURE
DIAGNOSTIC TECHNIQUES
DIFFRACTION
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELECTRON PROBES
ELECTRON TUBES
ELECTRONIC EQUIPMENT
ELEMENTS
EQUIPMENT
FABRICATION
FILMS
FLUOROSCOPY
HIGH TEMPERATURE
IONS
LATTICE PARAMETERS
MAGNETRONS
MASS SPECTROSCOPY
MEDICINE
MICROWAVE EQUIPMENT
MICROWAVE TUBES
NONMETALS
NUCLEAR MEDICINE
OXIDES
OXYGEN
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
POINT DEFECTS
PROBES
RADIOLOGY
SCATTERING
SINTERING
SPECTROSCOPY
SPUTTERING
SUPERCONDUCTING FILMS
SUPERCONDUCTIVITY
THERMODYNAMIC PROPERTIES
TRANSITION ELEMENT COMPOUNDS
TRANSITION TEMPERATURE
VACANCIES
X-RAY DIFFRACTION
YTTRIUM COMPOUNDS
YTTRIUM OXIDES