Highly reliable epitaxial YBaCuO thin-films using pressure-controlled magnetron sputtering method
Conference
·
· IEEE Transactions on Magnetics (Institute of Electrical and Electronics Engineers); (United States)
OSTI ID:5721160
- Osaka Univ., Toyonaka (Japan). Faculty of Engineering Science
The authors of this article ensure the reliability of the epitaxial YBaCuO films by a new sputtering technique. The authors' film (100 nm thick and no protection) showed no sign of degradation in its Tc value till this moment ({approximately}3000 hrs). Under the controlled discharge gas pressure, the in situ epitaxial YBaCuO film had Tc of 87 K. The c-axis lattice constants and the critical temperatures became very close to the bulk values as the pressure was going up to 1 Torr. The plasma emission spectra showed a reduction in the Ar spectrum intensities relative to the oxygen component with increasing pressure. This observation suggests that the reduced mean free path of the gas atoms is responsible for the improved film crystallinity and superconductivity.
- OSTI ID:
- 5721160
- Report Number(s):
- CONF-900944--
- Conference Information:
- Journal Name: IEEE Transactions on Magnetics (Institute of Electrical and Electronics Engineers); (United States) Journal Volume: 27:2
- Country of Publication:
- United States
- Language:
- English
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Journal Article
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Conference
·
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· IEEE Transactions on Magnetics (Institute of Electrical and Electronics Engineers); (United States)
·
OSTI ID:5767469
Related Subjects
36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360202 -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
360204 -- Ceramics
Cermets
& Refractories-- Physical Properties
ALKALINE EARTH METAL COMPOUNDS
ARGON
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
COPPER COMPOUNDS
COPPER OXIDES
CRYSTAL STRUCTURE
ELECTRON TUBES
ELECTRONIC EQUIPMENT
ELEMENTS
EMISSION SPECTRA
EPITAXY
EQUIPMENT
FILMS
FLUIDS
GASES
MAGNETRONS
MICROWAVE EQUIPMENT
MICROWAVE TUBES
NONMETALS
OXIDES
OXYGEN
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
PRESSURIZATION
RARE GASES
SPECTRA
SPUTTERING
SUPERCONDUCTING FILMS
THERMODYNAMIC PROPERTIES
TRANSITION ELEMENT COMPOUNDS
TRANSITION TEMPERATURE
YTTRIUM COMPOUNDS
YTTRIUM OXIDES
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360202 -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
360204 -- Ceramics
Cermets
& Refractories-- Physical Properties
ALKALINE EARTH METAL COMPOUNDS
ARGON
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
COPPER COMPOUNDS
COPPER OXIDES
CRYSTAL STRUCTURE
ELECTRON TUBES
ELECTRONIC EQUIPMENT
ELEMENTS
EMISSION SPECTRA
EPITAXY
EQUIPMENT
FILMS
FLUIDS
GASES
MAGNETRONS
MICROWAVE EQUIPMENT
MICROWAVE TUBES
NONMETALS
OXIDES
OXYGEN
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
PRESSURIZATION
RARE GASES
SPECTRA
SPUTTERING
SUPERCONDUCTING FILMS
THERMODYNAMIC PROPERTIES
TRANSITION ELEMENT COMPOUNDS
TRANSITION TEMPERATURE
YTTRIUM COMPOUNDS
YTTRIUM OXIDES