Hydrogen depth profiling using the 6. 385-MeV resonance in the sup 1 H( sup 15 N,. alpha. gamma. ) sup 12 C nuclear reaction
The use of {sup 15}N analysis ion beams as a probing beam can provide a powerful and non-destructive technique for detection of hydrogen in the near surface region of materials. The strong, isolated resonance at 6.385 MeV in the {sup 1}H({sup 15}N, {alpha}{gamma}){sup 12}C nuclear reaction indices a {gamma}-ray yield which is proportional to the hydrogen content of the material at the depth where the nuclear reaction occurs. The {sup 1}H depth profiling using this nuclear reaction resonance is done by increasing the energy of the {sup 15}N analysis ion beam from 6.385 MeV in steps of several KeV. The measured induced 4.43 MeV {gamma}-rays from this nuclear reaction are representative of the hydrogen presence in the material at the depth where the ion beam has the resonance energy. Hydrogen depth profiling using this reaction is done in the energy range of 6 to 10 MeV. The measured {gamma}-ray yield of a standard sample, with a well known amount of hydrogen, and the measured {gamma}-ray yield of the unknown sample and its non-hydrogen stoichiometry are used to determine the H atomic fraction of the unknown sample. The non-hydrogen stoichiometry of the unknown sample is frequently obtained by Rutherford backscattering spectrometry (RBS). A multilayer film of hydrogenated Si and SiO{sub 2} was also hydrogen depth profiled. The results show that the hydrogen incorporated in either Si or SiO{sub 2} layers is extremely stable. The hydrogen depth profiling of this multilayer also shows that hydrogen depth of profiling with the 6.385 MeV resonance in the {sup 1}H({sup 15}N, {alpha}{gamma}){sup 12}C nuclear reaction can have a good depth resolution of 700 {angstrom} at depth of 1.7 {mu}m.
- Research Organization:
- Arizona Univ., Tucson, AZ (United States)
- OSTI ID:
- 5732049
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
400101* -- Activation
Nuclear Reaction
Radiometric & Radiochemical Procedures
ALPHA PARTICLES
CARBON 12
CARBON ISOTOPES
CHALCOGENIDES
CHARGED PARTICLES
CHARGED-PARTICLE REACTIONS
CHEMICAL ANALYSIS
CHEMICAL REACTIONS
DEPTH
DIMENSIONS
ELASTIC SCATTERING
ELECTROMAGNETIC RADIATION
ELEMENTS
ENERGY RANGE
EVEN-EVEN NUCLEI
GAMMA RADIATION
HEAVY ION REACTIONS
HYDROGEN
HYDROGEN 1 TARGET
HYDROGENATION
IONIZING RADIATIONS
ISOTOPES
LIGHT NUCLEI
MEV RANGE
MEV RANGE 10-100
NITROGEN 15 REACTIONS
NONDESTRUCTIVE ANALYSIS
NONMETALS
NUCLEAR REACTION ANALYSIS
NUCLEAR REACTIONS
NUCLEI
OXIDES
OXYGEN COMPOUNDS
RADIATIONS
RUTHERFORD SCATTERING
SCATTERING
SEMIMETALS
SILICON
SILICON COMPOUNDS
SILICON OXIDES
STABLE ISOTOPES
TARGETS