X-ray absorption study of diamond films grown by chemical vapor deposition

Journal Article · Wed May 01 04:00:00 EDT 1991 · Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (USA)

DOI:https://doi.org/10.1116/1.577591· OSTI ID:5686127

Yang, X; Ruckman, M W; Skotheim, T A ^[1]; den Boer, M; Zheng, Y ^[2]; Badzian, A R; Badzian, T; Messier, R ^[3]; Srivatsa, A R ^[4]

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1. Brookhaven National Laboratory, Upton, New York 11973 (USA)
2. The City University of New York, New York, New York 10021 (USA)
3. The Pennsylvania State University, University Park, Pennsylvania 16802 (USA)
4. Moltech Corporation, Stony Brook, New York 11974 (USA)

Carbon {ital k}-edge x-ray absorption fine structure (XAFS) is used to study the structure and bonding of chemical vapor deposition (CVD) grown diamond and diamond-like carbon films. Diamond films grown at 875 {degree}C on silicon using a 1% CH{sub 4} /H{sub 2} mixture have near-edge spectra resembling type 1(a) natural diamond. The {ital k}-edges of the diamond-like films grown by electron cyclotron resonance CVD at 200 {degree}C using 10{sup {minus}4} Torr of CH{sub 4} show a broad main peak lacking the sharp structure of graphite or diamond. Comparing the near edges of the CVD diamond film with other carbon compounds (i.e., graphite) and the CVD diamond film, the diamond-like film shows a strong {pi}* feature at 285 eV indicative of sp{sup 2} bonded carbon and a feature at 289 eV, the {sigma}*(C--H) resonance indicating C--H bonds. The relatively weak extended x-ray absorption fine structure (EXAFS) shows that the diamond-like carbon film is highly disordered on an atomic level.

• DOE Contract Number: AC02-76CH00016
• OSTI ID: 5686127
• Journal Information: Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (USA), Journal Name: Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (USA) Vol. 9:3; ISSN JVTAD; ISSN 0734-2101
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360603* -- Materials-- Properties
ABSORPTION SPECTRA
CARBON
CHEMICAL COATING
CHEMICAL VAPOR DEPOSITION
CRYSTAL STRUCTURE
CYCLOTRON RESONANCE
DEPOSITION
DIAMONDS
ELECTRON CYCLOTRON-RESONANCE
ELEMENTAL MINERALS
ELEMENTS
FILMS
FINE STRUCTURE
MINERALS
NONMETALS
RESONANCE
SPECTRA
SURFACE COATING
X-RAY SPECTRA