Interfacial damage in ion-irradiated GaAs/AlAs superlattices

Journal Article · Wed Dec 15 04:00:00 EST 1993 · Physical Review, B: Condensed Matter; (United States)

DOI:https://doi.org/10.1103/PhysRevB.48.17629· OSTI ID:5660660

Klatt, J L; Averback, R S ^[1]; Forbes, D V; Coleman, J J ^[2]

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1. Department of Materials Science and Engineering, Materials Research Laboratory, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801 (United States)
2. Materials Research Laboratory, Microelectronics Laboratory, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801 (United States)

Damage creation at GaAs/AlAs/GaAs interfaces during irradiation with MeV Kr and Ar ions was investigated by ion channeling experiments. The GaAs layers became amorphous while the AlAs layers showed unusual damage behavior. At one interface, AlAs on GaAs, an amorphous phase grows into the AlAs while at the opposite interface, GaAs on AlAs, the AlAs remains crystalline. The asymmetry is also observed in samples with five alternating layers; amorphization occurs at the two AlAs on GaAs interfaces but not at the GaAs on AlAs interfaces. The rate at which the amorphous layer grows does not depend on the deposited damage energy alone, but rather depends on the ratio of the ionization to damage energies, demonstrating the importance of ionization in the damage process. At large ratios of ionization to damage energies, the growth rate can be zero or even negative.

• DOE Contract Number: FG02-91ER45439
• OSTI ID: 5660660
• Journal Information: Physical Review, B: Condensed Matter; (United States), Journal Name: Physical Review, B: Condensed Matter; (United States) Vol. 48:23; ISSN PRBMDO; ISSN 0163-1829
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360605* -- Materials-- Radiation Effects
ALUMINIUM ARSENIDES
ALUMINIUM COMPOUNDS
AMORPHOUS STATE
ARSENIC COMPOUNDS
ARSENIDES
BEAMS
CHANNELING
DAMAGE
ENERGY RANGE
GALLIUM ARSENIDES
GALLIUM COMPOUNDS
INTERFACES
ION BEAMS
ION CHANNELING
MEV RANGE
MEV RANGE 01-10
PHYSICAL RADIATION EFFECTS
PNICTIDES
RADIATION EFFECTS
SUPERLATTICES