Numerical model of the flow and heat transfer in a rotating disk chemical vapor deposition reactor
Steady, laminar, axisymmetric, and circumferentially uniform flow and heat transfer, including the effects of variable properties and buoyancy, have been modeled within a rotating disk chemical vapor deposition (CVD) reactor. The reactor is oriented vertically, with the hot, isothermal, spinning disk facing upward. The Navier--Stokes and energy equations have been solved for the carrier gas helium. The solutions have been obtained over a range of parameters, which is of importance in CVD applications. The primary parameters are the ratio of the disk temperature to the free stream temperature T/sub w//T/sub infinity/, the disk Reynolds number Re = r/sup 2//sub d/..omega../..nu../sub infinity/, a mixed convection parameter Gr/Re/sup 3/2/ = g( rho/sub infinity/-rho/sub w/)/( rho/sub w/..omega sqrt omega nu../sub infinity/), the dimensionless inlet velocity u/sub infinity//..sqrt omega nu../sub infinity/, and two geometric parameters r/sub 0//r/sub d/ and L/r/sub d/. Results are obtained for the velocity and the temperature fields and for the heat flux at the surface of the rotating disk. Comparisons are made with the one-dimensional, variable-property (excluding buoyant effects), infinite rotating disk solutions of Pollard and Newman. Results are presented in terms of a local Nusselt number. The potential uniformity of CVD in this geometry can be inferred from the variation of the Nusselt number over the surface of the rotating disk. The effects of buoyancy and the finite size of the rotating disk within the cylindrical reactor are clearly evident in the present work.
- Research Organization:
- Computational Mechanics Division, Sandia National Laboratories, Livermore, CA 94550
- OSTI ID:
- 5657968
- Journal Information:
- J. Heat Transfer; (United States), Journal Name: J. Heat Transfer; (United States) Vol. 109:4; ISSN JHTRA
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
420400* -- Engineering-- Heat Transfer & Fluid Flow
CHEMICAL COATING
CHEMICAL VAPOR DEPOSITION
DEPOSITION
DIFFERENTIAL EQUATIONS
ELEMENTS
ENERGY TRANSFER
EQUATIONS
FLUID FLOW
FLUIDS
GASES
HEAT TRANSFER
HELIUM
LAMINAR FLOW
MATERIALS
NAVIER-STOKES EQUATIONS
NONMETALS
NUMERICAL SOLUTION
NUSSELT NUMBER
PARTIAL DIFFERENTIAL EQUATIONS
RARE GASES
SEMICONDUCTOR MATERIALS
STEADY FLOW
SURFACE COATING