The SiO/sub 2//Si interface probed with positrons
Conference
·
OSTI ID:5649463
The effects of the heat treatment of Si covered with a thermally-grown approx.50 nm overlayer of SiO/sub 2/ were probed by means of measurements of positron annihilation characteristics obtained with a variable-energy positron beam. From measurements at elevated temperature (approx.500/sup 0/C) it was observed that positrons implanted overlapping the SiO/sub 2//Si interface decay from a state with properties distinctively different from the state in Si and in SiO/sub 2/. The nature of the annihilation characteristics indicates the presence of open volume defects. 19 refs., 2 figs., 1 tab.
- Research Organization:
- Brookhaven National Lab., Upton, NY (USA); International Business Machines Corp., Yorktown Heights, NY (USA). Thomas J. Watson Research Center
- DOE Contract Number:
- AC02-76CH00016
- OSTI ID:
- 5649463
- Report Number(s):
- BNL-40722; CONF-871124-86; ON: DE88006361
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
36 MATERIALS SCIENCE
360605* -- Materials-- Radiation Effects
656002 -- Condensed Matter Physics-- General Techniques in Condensed Matter-- (1987-)
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ANNIHILATION
ANTILEPTONS
ANTIMATTER
ANTIPARTICLES
BASIC INTERACTIONS
CHALCOGENIDES
CHEMICAL REACTIONS
ELECTROMAGNETIC INTERACTIONS
ELEMENTARY PARTICLES
ELEMENTS
FERMIONS
HEAT TREATMENTS
INTERACTIONS
INTERFACES
LAYERS
LEPTONS
MINERALS
OXIDATION
OXIDE MINERALS
OXIDES
OXYGEN COMPOUNDS
POSITRONS
SEMIMETALS
SILICA
SILICON
SILICON COMPOUNDS
SILICON OXIDES
360605* -- Materials-- Radiation Effects
656002 -- Condensed Matter Physics-- General Techniques in Condensed Matter-- (1987-)
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ANNIHILATION
ANTILEPTONS
ANTIMATTER
ANTIPARTICLES
BASIC INTERACTIONS
CHALCOGENIDES
CHEMICAL REACTIONS
ELECTROMAGNETIC INTERACTIONS
ELEMENTARY PARTICLES
ELEMENTS
FERMIONS
HEAT TREATMENTS
INTERACTIONS
INTERFACES
LAYERS
LEPTONS
MINERALS
OXIDATION
OXIDE MINERALS
OXIDES
OXYGEN COMPOUNDS
POSITRONS
SEMIMETALS
SILICA
SILICON
SILICON COMPOUNDS
SILICON OXIDES