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In situ TEM observations of heavy ion damage in gallium arsenide

Conference ·
OSTI ID:5649449
Transmission electron microscopy experiments have been performed to investigate the lattice damage created by heavy-ion bombardments in GaAs. These experiments have been performed in situ by using the HVEM - Ion Accelerator Facility at Argonne National Laboratory. The ion bombardments (50 keV Ar/sup +/ and Kr/sup +/) and the microscopy have been carried out at temperatures ranging from 30 to 300/sup 0/K. Ion fluences ranged from 2 x 10/sup 11/ to 5 x 10/sup 13/ ions cm/sup -2/. Direct-impact amorphization is observed to occur in both n-type and semi-insulating GaAs irradiated to low ion doses at 30/sup 0/K and room temperature. The probability of forming a visible defect is higher for low temperature irradiations than for room temperature irradiations. The amorphous zones formed at low temperature are stable to temperatures above 250/sup 0/K. Post-implantation annealing is seen to occur at room temperature for all samples irradiated to low doses until eventually all visible damage disappears. 14 refs., 3 figs., 1 tab.
Research Organization:
Illinois Univ., Urbana (USA). Dept. of Materials Science and Engineering; Argonne National Lab., IL (USA)
DOE Contract Number:
W-31109-ENG-38
OSTI ID:
5649449
Report Number(s):
CONF-871124-77; ON: DE88005984
Country of Publication:
United States
Language:
English