New method for the batch production of micro-Fresnel zone plates

Journal Article · Thu Apr 01 04:00:00 EST 1982 · J. Vac. Sci. Technol.; (United States)

DOI:https://doi.org/10.1116/1.571576· OSTI ID:5648537

Glocker, D; Wiseman, R

A new method has been developed for making micro-Fresnel zone plates used in the coded imaging of x rays and ..cap alpha.. particles produced from laser fusion target implosions. The method allows the fabrication of numerous plating molds from a single master mold, which is particularly useful in ..cap alpha..-particle imaging since each target shot requires a new zone plate. A master mold was made in polyimide using reactive ion etching, and a number of silicone rubber replicas were made of the mold. Each replica was then used to produce a number of photoresist final molds into which gold was electroplated. This microfabrication technique has produced high quality 10-..mu..m-thick zone plates having 100 zones and a 5-..mu..m-wide outer zone.

• Research Organization: Laboratory for Laser Energetics, University of Rochester, 250 East River Road, Rochester, New York 14623
• OSTI ID: 5648537
• Journal Information: J. Vac. Sci. Technol.; (United States), Journal Name: J. Vac. Sci. Technol.; (United States) Vol. 20:4; ISSN JVSTA
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
700205* -- Fusion Power Plant Technology-- Fuel
Heating
& Injection Systems
ALPHA PARTICLES
BEAMS
CASTING MOLDS
CHARGED PARTICLES
COATINGS
CONFINEMENT
DEPOSITION
ELASTOMERS
ELECTRODEPOSITED COATINGS
ELECTRODEPOSITION
ELECTROLYSIS
ELECTROMAGNETIC RADIATION
ELECTROPLATING
ELEMENTS
ENERGY RANGE
ETCHING
FABRICATION
GOLD
HEATING
IMAGES
IMIDES
IMPLOSIONS
INERTIAL CONFINEMENT
ION BEAMS
KEV RANGE
KEV RANGE 10-100
LASER IMPLOSIONS
LASER RADIATION
LASER TARGETS
LASER-PRODUCED PLASMA
LASER-RADIATION HEATING
LYSIS
MANUFACTURING
METALS
MEV RANGE
MEV RANGE 01-10
MOLDING
ORGANIC COMPOUNDS
ORGANIC NITROGEN COMPOUNDS
ORGANIC POLYMERS
PLASMA
PLASMA CONFINEMENT
PLASMA HEATING
PLATES
PLATING
POLYMERS
PRODUCTION
RADIATIONS
RUBBERS
SILICONES
SILOXANES
SURFACE COATING
SURFACE FINISHING
TARGETS
TRANSITION ELEMENTS