Microfocusing optics for hard x-rays fabricated by x-ray lithography
Book
·
OSTI ID:220775
- Univ. of Wisconsin, Madison, WI (United States). Center for X-ray Lithography
- Inst. of Solid State Technology, Roma (Italy)
- Argonne National Lab., IL (United States)
Lithographic techniques for fabrication of hard X-ray Fresnel Zone Plates are discussed. Practical results achieved at the center for X-ray Lithography of the University of Wisconsin-Madison are presented. Fabrication technology includes replication of an e-beam written master mask into a thick photoresist by synchrotron radiation X-ray lithography, and subsequent electroplating of a metal zone plate structure using photoresist pattern as a mold.
- OSTI ID:
- 220775
- Report Number(s):
- CONF-950793--; ISBN 0-8194-1875-7
- Country of Publication:
- United States
- Language:
- English
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